Actuatable mirror assembly

Abstract

An actuatable mirror assembly has an actuator apparatus with a main actuator unit fixed to the frame and an actuator mirror carrier unit that is displaceable by actuator vis-à-vis the main actuator unit. The mirror assembly has at least one mirror with a reflection surface secured to the actuator mirror carrier unit. A bearing device secures the mirror to the actuator mirror carrier unit. The bearing device is embodied such that an enclosed securing region of the mirror, provided by the bearing device, has an extent between maximally spaced-apart securing points of the bearing device in the direction of a maximal securing distance on the actuator mirror carrier unit, the extent being at least 15% of a typical extent of the reflection surface of the mirror. This can result in an improved actuatable mirror assembly, such as for use in projection lithography.

Dependencies are inferred from the claim text.