G03F 7/70208
Multiple illumination paths
Official title: {Multiple illumination paths, e.g. radiation distribution devices, microlens illumination systems, multiplexers or demultiplexers for single or multiple projection systems}
G03F7/70208 (Multiple illumination paths) appears on 138 US grants and 142 published applications in this corpus.
Search patents in G03F- Granted patents
- 138
- Published applications
- 142
- Assignees
- 56
- Inventors
- 285
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 3 | 0 |
| 1995 | 4 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 1 | 0 |
| 2000 | 3 | 0 |
| 2001 | 5 | 0 |
| 2002 | 2 | 7 |
| 2003 | 3 | 2 |
| 2004 | 7 | 6 |
| 2005 | 3 | 4 |
| 2006 | 4 | 7 |
| 2007 | 4 | 13 |
| 2008 | 4 | 9 |
| 2009 | 4 | 9 |
| 2010 | 8 | 12 |
| 2011 | 8 | 4 |
| 2012 | 2 | 7 |
| 2013 | 6 | 5 |
| 2014 | 7 | 3 |
| 2015 | 10 | 3 |
| 2016 | 8 | 8 |
| 2017 | 3 | 4 |
| 2018 | 3 | 6 |
| 2019 | 3 | 2 |
| 2020 | 6 | 4 |
| 2021 | 8 | 3 |
| 2022 | 2 | 3 |
| 2023 | 1 | 2 |
| 2024 | 2 | 3 |
| 2025 | 3 | 13 |
| 2026 | 2 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Illumination device including amplitude-division and beam movements157US 5,153,773 ACanon Kabushiki Kaisha · 1992
- Illumination device including an optical integrator defining a plurality of secondary light sources and related method132US 5,463,497 ACanon Kabushiki Kaisha · 1995
- Projection exposure method and apparatus100US 6,211,944 B1Nikon Corporation · 2001
- Projection exposure apparatus75US 6,252,647 B1Nikon Corporation · 2001
- Projection exposure method and apparatus70US 5,467,166 ANikon Corporation · 1995