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US 12,248,253 B2Granted
Optical device, exposure device, method for manufacturing flat panel display, and method for manufacturing device
AssigneeNikon Corporation
InventorsYasushi Mizuno, Masaki Kato
Life of this patent
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Abstract
An optical device includes a plurality of laser light sources, an output module having an optical modulator, and a time divider that is disposed between the plurality of laser light sources and the output module and that is configured to divide laser beams emitted from the plurality of laser light sources in time.
Claims20
An optical device comprising:
- a first spatial light modulator;
- a second spatial light modulator;
- an optical path switching machine into which pulse light including a plurality of pulses arranged at a time interval enters;
- and
- a stage configured to move an exposure object in a first direction relative to the first spatial light modulator or the second spatial light modulator,
- wherein the plurality of pulses includes a first pulse and a second pulse that are arranged at the time interval,
- wherein the optical path switching machine is configured (i) to divide the pulse light into at least the first pulse and the second pulse, (ii) to guide the first pulse to a first optical path in which the first spatial light modulator is disposed, and (iii) to guide the second pulse to a second optical path in which the second spatial light modulator is disposed, so that the first pulse and the second pulse are guided to the respective first and second optical paths at different timings, and
- wherein a moving speed of the stage is set based on an emission time of the first pulse or the second pulse.
5 more elements
An optical device comprising:
- a first spatial light modulator;
- a second spatial light modulator;
- an optical path switching machine into which pulse light including a plurality of pulses arranged at a time interval enters;
- a stage configured to move an exposure object in a first direction relative to first spatial light modulator or the second spatial light modulator;
- a first projection optical system configured to guide the first pulse from the first spatial light modulator to the exposure object;
- a second projection optical system configured to guide the second pulse from the second spatial light modulator to the exposure object;
- and
- a controller,
- wherein the plurality of pulses includes a first pulse and a second pulse that are arranged at the time interval,
- wherein the optical path switching machine is configured (i) to divide the pulse light into at least the first pulse and the second pulse, (ii) to guide the first pulse to a first optical path in which the first spatial light modulator is disposed, and (iii) to guide the second pulse to a second optical path in which the second spatial light modulator is disposed, so that the first pulse and the second pulse are guided to the respective first and second optical paths at different timings, and
- wherein the controller is configured to set at least one of a position and a posture of the first spatial light modulator or the second spatial light modulator or to adjust an optical element of the first projection optical system or the second projection optical system so that a projection position of the first image or the second image on the exposure object shifts in the first direction, based on the time interval.
8 more elements
An optical device comprising:
- a first spatial light modulator;
- a second spatial light modulator;
- an optical path switching machine into which pulse light including a plurality of pulses arranged at a time interval enters;
- a stage configured to move an exposure object in a first direction relative to the first spatial light modulator or the second spatial light modulator;
- a first projection optical system configured to guide the first pulse from the first spatial light modulator to the exposure object;
- a second projection optical system configured to guide the second pulse from the second spatial light modulator to the exposure object;
- and
- a controller,
- wherein the plurality of pulses includes a first pulse and a second pulse that are arranged at the time interval,
- wherein the optical path switching machine is configured (i) to divide the pulse light into at least the first pulse and the second pulse, (ii) to guide the first pulse to a first optical path in which the first spatial light modulator is disposed, and (iii) to guide the second pulse to a second optical path in which the second spatial light modulator is disposed, so that the first pulse and the second pulse are guided to the respective first and second optical paths at different timings, and
- wherein the controller is configured to transmit pattern data to the first spatial light modulator or the second spatial light modulator, the pattern data being adjusted so that a projection position of the first image or the second image on the exposure object shifts in the first direction based on at least one of a moving speed of the stage, an image updating timing of the first spatial light modulator or the second spatial light modulator, and the time interval.
8 more elements
Dependencies are inferred from the claim text.