Multi-channel light source for projection optics heating
AssigneeASML Netherlands B.V. and ASML Holding N.V.
InventorsLaurentius Johannes Adrianus Van Bokhoven, Mahesh Upendra Ajgaonkar
Life of this patent
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Abstract
Systems, apparatuses, and methods are provided for heating a plurality of optical components. An example method can include receiving an input radiation beam from a radiation source. The example method can further include generating a plurality of output radiation beams based on the input radiation beam. The example method can further include transmitting the plurality of output radiation beams towards a plurality of heater head optics configured to heat the plurality of optical components. Optionally, the example method can further include controlling a respective power value, and realizing a flat-top far-field profile, of each of the plurality of output radiation beams.
Claims24
A system, comprising:
- a radiation redistribution system configured to provide radiation to heat a plurality of mirrors, wherein the radiation redistribution system comprises:
- an optical input channel configured to receive an input radiation beam from a radiation source;
- a radiation splitting system configured to generate a plurality of output radiation beams based on the input radiation beam;
- a plurality of optical output channels configured to transmit the plurality of output radiation beams towards a plurality of heater head optics configured to heat the plurality of mirrors,
- wherein the plurality of heater head optics comprises:
- a plurality of preheaters configured to thermally condition one or more mirrors of the plurality of mirrors when not exposed to EUV radiation, and
- a plurality of sector heaters configured to thermally condition the one or more mirrors of the plurality of mirrors during and/or after exposure to EUV radiation;
- and
- a controller coupled to the plurality of preheaters and the plurality of sector heaters to control operation of the respective thermal conditioning.
An apparatus, comprising:
- an optical input channel configured to receive an input radiation beam from a radiation source;
- a set of radiation splitting devices configured to generate a plurality of output radiation beams based on the input radiation beam;
- and
- a plurality of optical output channels configured to transmit the plurality of output radiation beams towards a plurality of heater head optics configured to heat a plurality of mirrors,
- wherein the plurality of heater head optics comprises:
- a plurality of preheaters configured to thermally condition one or more mirrors of the plurality of mirrors when not exposed to EUV radiation, and
- a plurality of sector heaters configured to thermally condition the one or more mirrors of the plurality of mirrors during and/or after exposure to EUV radiation;
- and
- a controller coupled to the plurality of preheaters and the plurality of sector heaters to control operation of the respective thermal conditioning.
A method, comprising:
- receiving, by an optical input channel, an input radiation beam from a radiation source;
- generating, by a set of radiation splitting devices, a plurality of output radiation beams based on the input radiation beam;
- transmitting, by a plurality of optical output channels, the plurality of output radiation beams towards a plurality of heater head optics configured to heat a plurality of mirrors, wherein the plurality of heater head optics comprises a plurality of preheaters and a plurality of sector heaters;
- controlling the plurality of preheaters to thermally condition one or more mirrors of the plurality of mirrors when not exposed to EUV radiation;
- and
- controlling the plurality of sector heaters to thermally condition the one or more mirrors of the plurality of mirrors during and/or after exposure to EUV radiation.
Dependencies are inferred from the claim text.