US 2026/0177809 A1 · SPATIAL LIGHT MODULATION UNIT AND EXPOSURE DEVICE

Abstract

A spatial light modulation unit includes a spatial light modulator including a substrate, a plurality of mirrors arranged on a surface of the substrate in a plan view, and a frame body that is located over the substrate and surrounds the plurality of mirrors in the plan view, and a cover that is located over the frame body, is attached to the spatial light modulator so that a relative positional relationship with the spatial light modulator is fixed, and restricts incidence of light on the frame body, wherein a first surface of the cover faces the frame body, an opening of the cover extends from a side of the first surface to a side of a second surface, which is opposite to the side of the first surface, of the cover, and each of the plurality of mirrors is able to be brought into a plurality of states.

Claims24

Dependent claims

A spatial light modulation unit comprising:

a spatial light modulator including:
a substrate;
a plurality of mirrors arranged over a surface of the substrate in a plan view;
and
a frame body over the substrate, the frame body surrounding the plurality of mirrors in the plan view;
and
a cover that is located over the frame body, is attached to the spatial light modulator so that a relative positional relationship with the spatial light modulator is fixed, and restricts incidence of light on the frame body,
wherein a first surface of the cover faces the frame body,
wherein an opening of the cover extends from a side of the first surface to a side of a second surface, which is opposite to the side of the first surface, of the cover, and
wherein each of the plurality of mirrors is able to be brought into a plurality of states.

7 more elements

An exposure device comprising:

a spatial light modulator including a plurality of elements arranged on a surface in a plan view and a frame body surrounding the plurality of elements in the plan view;
an illumination unit that illuminates the spatial light modulator with illumination light;
a light shielding member that is attached to the spatial light modulator so that a relative positional relationship with the spatial light modulator is fixed and blocks the illumination light from entering the frame body;
a projection unit that projects light from the plurality of elements onto an object;
and
a stage on which the spatial light modulator is mounted and that is movable in a plane intersecting an optical axis of the projection unit,
wherein an illumination region of the illumination unit is set so that the plurality of elements and a region surrounding the plurality of elements in the plan view are illuminated with the illumination light,
wherein the plurality of elements are irradiated by the illumination region regardless of a position of the stage within a movable range in a first direction in the plane, and
wherein the plurality of elements are irradiated by the illumination region regardless of a position of the stage within a movable range in a second direction, which intersects with the first direction in the plane.

6 more elements

Dependencies are inferred from the claim text.

Spatial light modulation unit and exposure device

Life of this patent

Spatial light modulation unit and exposure device

Life of this patent

Abstract

Claims24