G03F 7/162
Coating on a rotating support
Official title: {Coating on a rotating support, e.g. using a whirler or a spinner}
G03F7/162 (Coating on a rotating support) appears on 1,414 US grants and 1,583 published applications in this corpus.
Search patents in G03F- Granted patents
- 1,414
- Published applications
- 1,583
- Assignees
- 404
- Inventors
- 2,885
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 4 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 3 | 0 |
| 1982 | 2 | 0 |
| 1983 | 4 | 0 |
| 1984 | 1 | 0 |
| 1985 | 4 | 0 |
| 1986 | 3 | 0 |
| 1987 | 2 | 0 |
| 1988 | 3 | 0 |
| 1989 | 11 | 0 |
| 1990 | 6 | 0 |
| 1991 | 8 | 0 |
| 1992 | 5 | 0 |
| 1993 | 11 | 0 |
| 1994 | 8 | 0 |
| 1995 | 15 | 0 |
| 1996 | 6 | 0 |
| 1997 | 14 | 0 |
| 1998 | 30 | 0 |
| 1999 | 44 | 0 |
| 2000 | 30 | 0 |
| 2001 | 32 | 16 |
| 2002 | 29 | 34 |
| 2003 | 36 | 17 |
| 2004 | 22 | 25 |
| 2005 | 16 | 27 |
| 2006 | 11 | 26 |
| 2007 | 8 | 36 |
| 2008 | 8 | 27 |
| 2009 | 13 | 27 |
| 2010 | 24 | 17 |
| 2011 | 21 | 26 |
| 2012 | 19 | 22 |
| 2013 | 21 | 17 |
| 2014 | 22 | 36 |
| 2015 | 16 | 34 |
| 2016 | 30 | 56 |
| 2017 | 45 | 184 |
| 2018 | 79 | 137 |
| 2019 | 130 | 148 |
| 2020 | 115 | 170 |
| 2021 | 94 | 91 |
| 2022 | 107 | 120 |
| 2023 | 91 | 85 |
| 2024 | 81 | 91 |
| 2025 | 81 | 67 |
| 2026 | 48 | 47 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Solution treatment apparatus and cleaning method22 Sep 2026US 12,743,033 B2Tokyo Electron Limited
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- Photoactive compounds1 Oct 2026US 2026/0299409 A1Merck Patent GmbH
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- Fabrication of microtargets for testing an optical particulate sensor (ops)24 Sep 2026US 2026/0287999 A1Honeywell International Inc.
Most cited
By later US patents
- Coater/developer, coating/developing method, and storage medium469US 7,591,601 B2Tokyo Electron Limited · 2009
- Hybrid pulsed valve for thin film coating and method146US 5,403,617 AMobium Enterprises Corporation · 1995
- Removal of coating from periphery of a semiconductor wafer143US 4,510,176 AAT&T Bell Laboratories · 1985
- Method and apparatus for manufacturing a semiconductor device126US 5,393,624 ATokyo Electron Limited · 1995
- Method of forming coating film and apparatus therefor126US 5,658,615 ATokyo Electron Kyushu Limited · 1997