Coater/developer, coating/developing method, and storage medium

A coating and developing method forming a coating film on a substrate in a first unit block provided at a stage subsequent to a carrier block into which the substrate has been carried with a carrier;

• thereafter conveying the substrate to an exposure unit through an interface block provided at a stage subsequent to the first unit block;
• performing development in a second unit block on the substrate subjected to exposure in the exposure unit and returned therefrom through the interface block, and transferring the substrate to the carrier block, the second unit block being stacked on the first unit block and having a conveyance path of the substrate from the interface block to the carrier block, wherein:
• the second unit block includes a development module configured to perform the development on the substrate, a heating module configured to heat the substrate before and after the development, a cooling module configured to cool the substrate after the heating, and a substrate conveyance part configured to transfer the substrate to and receive the substrate from the modules,
• the heating module includes a pair of rotary bodies configured to rotate about respective horizontal axles, the rotary bodies being spaced apart from each other in a direction along the conveyance path of the substrate so that the rotational axles thereof are parallel to each other;
• and a conveyance path member engaged with and extended between the rotary bodies so as to move along an orbit, the conveyance path member forming a part of the conveyance path of the substrate placed on the conveyance path member, and
• the coating and developing method comprises the steps of:
• transferring the substrate from the substrate conveyance part onto the conveyance path member through a first transfer part provided at an upstream end of the conveyance path;
• heating the substrate while moving the substrate to a downstream side with the conveyance path member;
• moving the substrate to a second transfer part provided at a downstream end of the conveyance path and transferring the substrate from the conveyance path member to the substrate conveyance part;
• and
• causing the conveyance path member without the substrate placed thereon to move along the orbit to return from the second transfer part to the first transfer part.