C23C 16/5093
Coaxial electrodes
Official title: {Coaxial electrodes}
C23C16/5093 (Coaxial electrodes) appears on 62 US grants and 38 published applications in this corpus.
Search patents in C23C- Granted patents
- 62
- Published applications
- 38
- Assignees
- 43
- Inventors
- 152
- Latest grant
- 3 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 2 | 0 |
| 1986 | 2 | 0 |
| 1987 | 5 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 5 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 4 | 0 |
| 1999 | 1 | 0 |
| 2000 | 2 | 0 |
| 2001 | 0 | 0 |
| 2002 | 2 | 1 |
| 2003 | 0 | 4 |
| 2004 | 2 | 1 |
| 2005 | 1 | 3 |
| 2006 | 3 | 2 |
| 2007 | 2 | 0 |
| 2008 | 5 | 4 |
| 2009 | 0 | 0 |
| 2010 | 0 | 1 |
| 2011 | 0 | 1 |
| 2012 | 1 | 1 |
| 2013 | 0 | 2 |
| 2014 | 0 | 1 |
| 2015 | 2 | 2 |
| 2016 | 2 | 2 |
| 2017 | 0 | 2 |
| 2018 | 3 | 2 |
| 2019 | 0 | 0 |
| 2020 | 1 | 2 |
| 2021 | 1 | 2 |
| 2022 | 0 | 2 |
| 2023 | 1 | 1 |
| 2024 | 1 | 0 |
| 2025 | 1 | 2 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Atomic layer deposition and vapor deposition reactor with in-chamber microplasma source3 Mar 2026US 12,565,703 B2The Board of Trustees of the University of Illinois
- Plasma coating method and plasma coating system13 Jan 2026US 12,522,919 B2Innovative Coating Solutions
- Pro-biofilm coating, method for the production thereof and substrate coated with the same14 Oct 2025US 12,441,970 B2FundacióN Rioja Salud
- Coating apparatus and coating method13 Feb 2024US 11,898,248 B2Jiangsu Favored Nanotechnology Co., Ltd.
- Rotary plasma reactor3 Jan 2023US 11,545,343 B2Board of Trustees of Michigan State University
- Electrode assembly and plasma enhanced chemical vapor deposition equipment12 Jun 2025US 2025/0188614 A1Yingkou Jinchen Machinery Co., Ltd.
- Plasma coating method and plasma coating system22 May 2025US 2025/0163574 A1Innovative Coating Solutions
- Film forming method and atmospheric plasma film forming apparatus14 Dec 2023US 2023/0399748 A1FUJIFILM Corporation
- Pro-biofilm coating, method for the production thereof and substrate coated with the same30 Jun 2022US 2022/0204904 A1FundacióN Rioja Salud
- Plasma-enhanced chemical vapor deposition of carbon-based coatings on surfaces2 Jun 2022US 2022/0170157 A1AGM Container Controls, Inc.
Most cited
By later US patents
- Semiconductor processing with DC assisted RF power for improved control137US 9,373,517 B2APPLIED Materials.Inc. · 2016
- Semiconductor processing with DC assisted RF power for improved control94US 10,032,606 B2APPLIED Materials.Inc. · 2018
- Radio frequency plasma enhanced chemical vapor deposition process and reactor77US 5,052,339 AAir Products and Chemicals, Inc. · 1991
- Plasma CVD system57US 5,372,648 AMatsushita Electric Industrial Co., Ltd. · 1994
- Process for glow-discharge-activated reactive deposition of metal from a gas phase49US 4,894,256 AU. S. Philips Corporation · 1990