C23C 16/4487
By using a condenser
Official title: {by using a condenser}
C23C16/4487 (By using a condenser) appears on 18 US grants and 16 published applications in this corpus.
Search patents in C23C- Granted patents
- 18
- Published applications
- 16
- Assignees
- 9
- Inventors
- 38
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 2 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 2 |
| 2005 | 1 | 1 |
| 2006 | 0 | 1 |
| 2007 | 2 | 2 |
| 2008 | 1 | 1 |
| 2009 | 3 | 2 |
| 2010 | 1 | 0 |
| 2011 | 1 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 2 |
| 2019 | 1 | 1 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 1 | 1 |
| 2023 | 1 | 0 |
| 2024 | 0 | 1 |
| 2025 | 0 | 0 |
| 2026 | 1 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Liquid precursor recovery module30 Jun 2026US 12,668,874 B2APPLIED Materials.Inc.
- Chemical delivery system and method of operating the chemical delivery system5 Sep 2023US 11,746,413 B2Entegris, Inc.
- Chemical delivery system and method of operating the chemical delivery system23 Aug 2022US 11,421,320 B2Entegris, Inc.
- Apparatus and method for generating a vapor for a CVD or PVD device10 Dec 2019US 10,501,847 B2Aixtron SE
- Method and apparatus for generating a precursor for a semiconductor processing system22 Nov 2011US 8,062,422 B2APPLIED Materials.Inc.
- Methods and system for precursor recycling16 Apr 2026US 2026/0103799 A1ASM IP Holding B. V.
- Semiconductor manufacturing apparatus and a method for manufacturing of a semiconductor26 Mar 2026US 2026/0085413 A1ASM IP Holding B. V.
- Liquid precursor recovery module5 Dec 2024US 2024/0401193 A1APPLIED Materials.Inc.
- Chemical delivery system and method of operating the chemical delivery system22 Sep 2022US 2022/0298629 A1Entegris, Inc.
- Chemical delivery system and method of operating the chemical delivery system13 Jun 2019US 2019/0177840 A1Entegris, Inc.
Most cited
By later US patents
- Apparatus for providing gas to a processing chamber89US 7,186,385 B2APPLIED Materials.Inc. · 2007
- Method and apparatus of generating PDMAT precursor87US 6,905,541 B2APPLIED Materials.Inc. · 2005
- Reactants delivery system for optical waveguide manufacturing51US 4,212,663 ACorning Glass Works · 1980
- Method and apparatus of generating PDMAT precursor38US 7,270,709 B2APPLIED Materials.Inc. · 2007
- Chemical vapor deposition apparatus20US 5,776,255 ACanon Kabushiki Kaisha · 1998