Liquid precursor recovery module

A vapor deposition precursor recovery system, comprising:

• a precursor container comprising a precursor material;
• a carrier gas container comprising a carrier gas;
• a vaporizer having one or more inlets in fluid connection with the precursor container and the carrier gas container, and an outlet in fluid connection with a gas distributor and a condenser assembly;
• the condenser assembly comprising a condenser disposed between an exhaust line and the gas distributor, wherein the condenser is in fluid connection with a recycled precursor container, and a cooling circuit;
• and
• a system line disposed between the outlet of the vaporizer and the gas distributor, and between the outlet of the vaporizer and the condenser assembly, the system line comprising a split, a first end of the split connected to the condenser and a second end of the split connected to the gas distributor;
• wherein the condenser comprises an internal pressure and the exhaust line comprises an internal pressure, wherein a ratio of the condenser internal pressure and the exhaust line internal pressure is greater than or about 1.1.

A method for recycling a vapor deposition precursor, comprising:

• vaporizing a precursor material a vaporizer;
• flowing the vaporized precursor material and a carrier gas to a process chamber by a system line;
• diverting the vaporized precursor material and the carrier gas to a condenser after a preselected period of time by the system line, wherein the system line comprises a split, a first end of the split connected to the condenser and a second end of the split connected to the process chamber;
• condensing the precursor material;
• exhausting the carrier gas;
• and
• collecting the condensed precursor material in a recycled precursor container.