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US 2026/0103799 A1Published application
Methods and system for precursor recycling
AssigneeASM IP Holding B.V.
InventorsPaul Ma, Jacqueline Wrench
Life of this patent
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Abstract
Various embodiments of the present technology may provide a reactor, a first vessel having an inlet coupled to an inlet of the reactor, a second vessel having an inlet coupled to the inlet of the reactor, and an exhaust line coupled to an outlet of the reactor, the inlet of the first vessel, and the inlet of the second vessel. The first and second vessels may be configured to receive a vapor though the exhaust line and recondense the vapor into a solid material to be reused during a precursor pulsing step.
Claims20
A system, comprising:
- a reactor comprising an inlet and an outlet;
- a first vessel comprising a first inlet and a first outlet coupled to the inlet of the reactor;
- a second vessel comprising a second inlet and a second outlet coupled to the inlet of the reactor;
- and
- an exhaust system coupled to the outlet of the reactor, the first inlet of the first vessel, and the second inlet of the second vessel;
- wherein one of the first vessel and the second vessel is configured to sublimate a solid precursor therein for processing, and wherein the other of the first vessel and the second vessel is maintained in an idle state having a temperature that allows unused precursor received from the exhaust system to recondense therein.
3 more elements
A method, comprising:
- flowing a precursor from a first vessel to a reactor for processing;
- flowing unused precursor from the reactor into an exhaust system coupled to the reactor;
- flowing the unused precursor from the exhaust system to a second vessel;
- and
- condensing the unused precursor into a solid state in the second vessel to be used as the precursor in future processing.
2 more elements
A method, comprising:
- flowing a precursor from a first vessel to a reactor for processing;
- flowing unused precursor from the reactor to a second vessel;
- and
- condensing the unused precursor into a solid state in the second vessel to be used as the precursor in future processing.
1 more element
Dependencies are inferred from the claim text.