Chemical delivery system and method of operating the chemical delivery system

A method of operating a chemical delivery system comprising at least one bulk container, multiple run/refill chambers, and at least one deposition chamber, the method comprising:

• storing a precursor in at least one of the bulk containers;
• transporting the precursor in vapor form from the bulk container(s) to a first run/refill chamber;
• receiving the precursor in vapor form in the first run/refill chamber;
• condensing and storing the precursor in solid form in the first run/refill chamber;
• causing sublimation of the solid precursor within the first run/refill chamber while transporting the precursor in vapor form from the bulk container(s) to a second run/refill chamber;
• and transporting the sublimed precursor in vapor form from the first run/refill chamber to a first deposition chamber, wherein at least one of the run/refill chambers includes a plurality of spaced tubes having a plurality of surfaces configured to receive the precursor in vapor form and store the precursor in solid form.