C23C 16/4483
Using a porous body
Official title: {using a porous body}
C23C16/4483 (Using a porous body) appears on 76 US grants and 63 published applications in this corpus.
Search patents in C23C- Granted patents
- 76
- Published applications
- 63
- Assignees
- 33
- Inventors
- 165
- Latest grant
- 16 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1993 | 3 | 0 |
| 1994 | 3 | 0 |
| 1995 | 2 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 8 | 0 |
| 1999 | 1 | 0 |
| 2000 | 3 | 0 |
| 2001 | 2 | 3 |
| 2002 | 3 | 2 |
| 2003 | 3 | 1 |
| 2004 | 0 | 3 |
| 2005 | 1 | 1 |
| 2006 | 3 | 5 |
| 2007 | 1 | 1 |
| 2008 | 0 | 2 |
| 2009 | 2 | 1 |
| 2010 | 3 | 1 |
| 2011 | 1 | 3 |
| 2012 | 3 | 4 |
| 2013 | 1 | 4 |
| 2014 | 2 | 0 |
| 2015 | 2 | 3 |
| 2016 | 4 | 1 |
| 2017 | 0 | 3 |
| 2018 | 3 | 1 |
| 2019 | 3 | 3 |
| 2020 | 1 | 2 |
| 2021 | 2 | 6 |
| 2022 | 2 | 4 |
| 2023 | 5 | 3 |
| 2024 | 3 | 2 |
| 2025 | 0 | 3 |
| 2026 | 3 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Capacitive sensor system for precursor level measurement and method therefor16 Jun 2026US 12,656,165 B2ASM IP Holding B. V.
- Substrate processing apparatus, processing gas concentrating apparatus, and substrate processing method21 Apr 2026US 12,606,910 B2Tokyo Electron Limited
- Substrate processing apparatus, raw material cartridge, substrate processing method, and raw material cartridge manufacturing method20 Jan 2026US 12,529,138 B2Tokyo Electron Limited
- Precursor container19 Nov 2024US 12,146,218 B2Picosun Oy
- Precursor supply unit, substrate processing system, and method of fabricating semiconductor device using the same16 Apr 2024US 11,959,170 B2Samsung Electronics Co., Ltd.
- Evaporation chamber of a device for evaporating chemical compounds30 Jul 2026US 2026/0216616 A1
- Vaporizer13 Nov 2025US 2025/0346989 A1Lintec Corporation
- Precursor delivery vessel, precursor delivery system, and precursor deposition apparatus30 Jan 2025US 2025/0034703 A1ASM IP Holding B. V.
- Semiconductor chemical precursor with gas passages23 Jan 2025US 2025/0027199 A1APPLIED Materials.Inc.
- Precursor container14 Mar 2024US 2024/0084449 A1Picosun Oy
Most cited
By later US patents
- Sublimation bed employing carrier gas guidance structures586US 7,122,085 B2ASM America, Inc. · 2006
- System for controlling the sublimation of reactants563US 7,601,225 B2ASM International N.V. · 2009
- System for controlling the sublimation of reactants559US 8,309,173 B2ASM International N.V. · 2012
- Method for controlling the sublimation of reactants554US 7,851,019 B2ASM International N.V. · 2010
- Method and apparatus to help promote contact of gas with vaporized material551US 8,444,120 B2Advanced Technology Materials, Inc. · 2013