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US 7,851,019 B2Granted
Method for controlling the sublimation of reactants
AssigneeASM International N.V.
InventorsMarko Tuominen, Eric Shero, Mohith Verghese
Life of this patent
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Abstract
An apparatus and method improves heating of a solid precursor inside a sublimation vessel. In one embodiment, inert, thermally conductive elements are interspersed among units of solid precursor. For example the thermally conductive elements can comprise a powder, beads, rods, fibers, etc. In one arrangement, microwave energy can directly heat the thermally conductive elements.
Claims19
A method of producing a vapor from a solid precursor for processing a substrate, comprising:
- placing independent solid units of precursor into a vessel;
- interspersing a plurality of independent units of thermally conductive material with the units of precursor, the plurality of independent units comprising a plurality of rods, wherein interspersing comprises inserting the plurality of rods into the vessel, wherein each independent unit of thermally conductive material is surrounded by the units of precursor, the units of precursor being separate and independent of the units of thermally conductive material;
- feeding a carrier gas into the vessel through an inlet of the vessel;
- forming a vapor through applying energy from a separate energy source to both the thermally conductive material and the solid units of precursor;
- and
- transporting the vapor from an outlet of the vessel to a reaction chamber with said carrier gas.
3 more elements
Dependencies are inferred from the claim text.