Precursor delivery vessel, precursor delivery system, and precursor deposition apparatus
AssigneeASM IP Holding B.V.
InventorsQuentin Nikitas Nicolas Lionel Eric Tricas, Alessandro Viva, Theodorus G.M. Oosterlaken, Jeroen Fluit
Life of this patent
Estimating the term…
Abstract
A vapor phase precursor delivery system for delivering a vapor phase precursor for depositing a layer in a vapor phase deposition apparatus is disclosed. The precursor delivery vessel is constructed and arranged to store a solid precursor and to deliver a vapor phase precursor at a vessel outlet. The system being provided with a plate provided with holes to allow for gas transport between the chamber and the part of the vessel where the solid precursor is stored.
Claims20
A precursor delivery vessel constructed and arranged to store a solid precursor and to deliver a vapor phase precursor at a vessel outlet, which is constructed in fluid communication with a chamber being defined by a top plate, and a bottom plate constructed and arranged to be supported on a top surface of the solid precursor and to be moveable with the top surface of the solid precursor in the vessel, wherein the bottom plate is provided with holes to allow for gas transport between the chamber and a part of the vessel where the solid precursor is stored and to allow sublimated precursor from the solid precursor to enter the chamber.
A precursor delivery system to provide a vapor phase precursor from a solid precursor, the system comprising:
- a vessel constructed and arranged for storing solid precursor and provided with a vessel outlet, which vessel outlet is constructed and arranged in fluid communication with a chamber constructed and arranged to be supported on top of the solid precursor and move with a level of the solid precursor in the vessel,
- a holder constructed and arranged to hold the vessel;
- and
- a vapor phase outlet constructed and arranged to connect to the vessel outlet for delivery of the vapor phase precursor, wherein the chamber is being defined by a top plate, and a bottom plate constructed and arranged to be supported on the top surface of the solid precursor and the bottom plate is provided with holes to allow for gas transport between a part of the vessel where the solid precursor is stored and the chamber to allow sublimated precursor from the solid precursor to enter the chamber.
A precursor delivery system to provide a vapor phase precursor from a solid precursor, the system comprising:
- a holder constructed and arranged to hold a vessel for storing and sublimating a solid precursor;
- an inert gas source constructed an arranged to connect to the vessel to deliver inert gas to the vessel;
- and
- a vapor phase outlet constructed and arranged to connect to the vessel for delivery of the vapor phase precursor, wherein the holder is constructed and arranged for allowing movement of the vessel.
Dependencies are inferred from the claim text.