Precursor container
AssigneePicosun Oy
InventorTom Blomberg
Life of this patent
Estimating the term…
Abstract
Precursor container, comprising a first volume formed by a first chamber to house precursor material, a second volume formed by a second chamber and separated from the first volume by a partition wall, and a conduit passing through the partition wall and extending from the first volume to the second volume providing the precursor material housed within the first volume with a route to the second volume following a pressure increase in the first volume. The partition wall is a gas-permeable wall allowing gas from the first volume to permeate to the second volume.
Claims6
A method for handling precursor material in a precursor container comprising a first volume formed by a first chamber, a second volume formed by a second chamber, the second volume being separated from the first volume by a gas-permeable partition wall, the method comprising:
- increasing the pressure in the first volume to cause precursor material housed within the first volume to extend from the first volume to the second volume along a conduit passing through the partition wall, wherein the conduit comprises an inlet disposed in the first volume and immersed in the precursory material, below a surface level or meniscus of the precursory material, and an outlet disposed in the second volume;
- and providing a gas flow from the first volume to the second volume through the gas-permeable partition wall.
Dependencies are inferred from the claim text.