C23C 16/4402
Reduction of impurities in the source gas
Official title: {Reduction of impurities in the source gas}
C23C16/4402 (Reduction of impurities in the source gas) appears on 260 US grants and 296 published applications in this corpus.
Search patents in C23C- Granted patents
- 260
- Published applications
- 296
- Assignees
- 151
- Inventors
- 760
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 4 | 0 |
| 1993 | 5 | 0 |
| 1994 | 3 | 0 |
| 1995 | 6 | 0 |
| 1996 | 5 | 0 |
| 1997 | 10 | 0 |
| 1998 | 6 | 0 |
| 1999 | 9 | 0 |
| 2000 | 10 | 0 |
| 2001 | 10 | 2 |
| 2002 | 8 | 10 |
| 2003 | 12 | 16 |
| 2004 | 7 | 16 |
| 2005 | 11 | 15 |
| 2006 | 9 | 16 |
| 2007 | 7 | 17 |
| 2008 | 8 | 13 |
| 2009 | 6 | 12 |
| 2010 | 6 | 12 |
| 2011 | 6 | 10 |
| 2012 | 8 | 10 |
| 2013 | 7 | 6 |
| 2014 | 6 | 6 |
| 2015 | 4 | 11 |
| 2016 | 5 | 17 |
| 2017 | 9 | 5 |
| 2018 | 6 | 3 |
| 2019 | 7 | 8 |
| 2020 | 4 | 13 |
| 2021 | 9 | 15 |
| 2022 | 5 | 15 |
| 2023 | 12 | 16 |
| 2024 | 10 | 5 |
| 2025 | 11 | 20 |
| 2026 | 4 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Methods for forming metal oxide layers with enhanced purity606US 6,395,650 B1International Business Machines Corporation · 2002
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