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US 2026/0061364 A1Published application
Storage and delivery vessels and related methods
AssigneeEntegris, Inc.
InventorsEd A. Sturm, Joe R. Despres
Life of this patent
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Abstract
Described are methods, systems, and apparatus for processing a gas mixture that contains at least two gases by contacting the gas mixture with a membrane that allows for preferential flow of one of the gases through the membrane, to separate one constituent gas from the mixture.
Claims10
A system for delivering reagent gas, the system comprising:
- a storage vessel comprising a storage vessel interior and an opening that is connected to the storage vessel interior,
- a separation membrane that allows preferential flow of gas having a lower kinetic diameter through the separation membrane relative to gas having a higher kinetic diameter, connected to the storage vessel interior, the separation membrane having a permeate side and a retentate side, and
- a stored gas mixture comprising a reagent gas and a diluent gas stored in the storage vessel,
- wherein when a portion of the gas mixture is flowed through the separation membrane from the retentate side to the permeate side, a concentrated reagent gas having an increased concentration of the reagent gas compared to the stored gas mixture is produced within the storage vessel on the retentate side of the separation membrane.
1 more element
Dependencies are inferred from the claim text.