Devices and systems for advanced purification and related methods
AssigneeEntegris, Inc.
InventorsRobert L. Wright, JR., Lucas B. Henderson, Bryan C. Hendrix, David M. Ermert, Rocky Dean Gipson
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Abstract
Devices systems for the advanced purification of precursor material and related methods are provided. A vessel assembly comprises a vessel. The vessel is configured to contain a precursor material. The precursor material comprises at least one impurity. The vessel assembly comprises a sorbent medium. When the precursor material is vaporized to obtain a vaporized precursor comprising the at least one impurity, the sorbent medium is contained in the vessel in a location that is in a flow path of the vaporized precursor. The sorbent medium is configured to sorb the at least one impurity.
Claims20
A vessel assembly comprising:
- a vessel,
- wherein the vessel is configured to contain a precursor material,
- wherein the precursor material comprises at least one impurity;
- and
- a sorbent medium,
- wherein, when the precursor material is vaporized to obtain a vaporized precursor comprising the at least one impurity, the sorbent medium is contained in the vessel in a location that is in a flow path of the vaporized precursor,
- wherein the sorbent medium is configured to sorb the at least one impurity.
A system comprising:
- a first vessel,
- wherein the first vessel defines a first volume,
- wherein the first vessel is configured to contain a precursor material,
- wherein the precursor material comprises at least one impurity;
- a second vessel fluidly connected to the first vessel,
- wherein the second vessel defines a second volume,
- wherein the second vessel is configured such that, when the at least one impurity is vaporized in the first vessel to obtain an impurity vapor, the impurity vapor is present in the first volume and the second volume;
- and
- a sorbent medium contained in the second vessel,
- wherein the sorbent medium is configured to sorb the impurity vapor.
A method comprising:
- obtaining a first vessel defining a first volume,
- wherein the first vessel comprises a precursor material,
- wherein the precursor material comprises at least one impurity;
- obtaining a second vessel defining a second volume,
- wherein the second vessel comprises a sorbent medium;
- and
- heating the precursor material to vaporize the at least one impurity to obtain an impurity vapor in the first volume and the second volume,
- wherein the sorbent medium sorbs the impurity vapor.
Dependencies are inferred from the claim text.