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US 12,539,487 B2Granted
Storage and delivery vessels and related methods
AssigneeEntegris, Inc.
InventorsEd A. Sturm, Joe R. Despres
Life of this patent
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Abstract
Described are methods, systems, and apparatus for processing a gas mixture that contains at least two gases by contacting the gas mixture with a membrane that allows for preferential flow of one of the gases through the membrane, to separate one constituent gas from the mixture.
Claims13
A method of processing a stored gas mixture contained in a storage vessel, the stored gas mixture comprising reagent gas and diluent gas, the method comprising:
- contacting the stored gas mixture with a separation membrane that allows preferential flow of the diluent gas through the separation membrane relative to the reagent gas;
- allowing a portion of the diluent gas of the stored gas mixture to flow through the separation membrane to produce a concentrated reagent gas having an increased concentration of the reagent gas compared to the stored gas mixture;
- and
- removing diluent gas from the storage vessel, through the separation membrane, to produce the concentrated reagent gas within the storage vessel.
1 more element
Dependencies are inferred from the claim text.