C23C 14/50
Substrate holders
C23C14/50 (Substrate holders) appears on 1,733 US grants and 2,147 published applications in this corpus.
Search patents in C23C- Granted patents
- 1,733
- Published applications
- 2,147
- Assignees
- 811
- Inventors
- 4,638
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 4 | 0 |
| 1977 | 9 | 0 |
| 1978 | 9 | 0 |
| 1979 | 4 | 0 |
| 1980 | 6 | 0 |
| 1981 | 9 | 0 |
| 1982 | 3 | 0 |
| 1983 | 7 | 0 |
| 1984 | 7 | 0 |
| 1985 | 4 | 0 |
| 1986 | 8 | 0 |
| 1987 | 3 | 0 |
| 1988 | 6 | 0 |
| 1989 | 13 | 0 |
| 1990 | 15 | 0 |
| 1991 | 13 | 0 |
| 1992 | 13 | 0 |
| 1993 | 20 | 0 |
| 1994 | 14 | 0 |
| 1995 | 20 | 0 |
| 1996 | 16 | 0 |
| 1997 | 20 | 0 |
| 1998 | 39 | 0 |
| 1999 | 44 | 0 |
| 2000 | 48 | 0 |
| 2001 | 53 | 20 |
| 2002 | 36 | 39 |
| 2003 | 33 | 42 |
| 2004 | 27 | 31 |
| 2005 | 25 | 53 |
| 2006 | 14 | 47 |
| 2007 | 12 | 40 |
| 2008 | 9 | 42 |
| 2009 | 9 | 67 |
| 2010 | 33 | 66 |
| 2011 | 29 | 85 |
| 2012 | 42 | 80 |
| 2013 | 49 | 77 |
| 2014 | 51 | 82 |
| 2015 | 69 | 84 |
| 2016 | 61 | 85 |
| 2017 | 59 | 114 |
| 2018 | 56 | 100 |
| 2019 | 65 | 126 |
| 2020 | 79 | 136 |
| 2021 | 87 | 122 |
| 2022 | 90 | 172 |
| 2023 | 90 | 118 |
| 2024 | 102 | 153 |
| 2025 | 136 | 98 |
| 2026 | 63 | 68 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Mechanical locking sputtering target bonding method and target assemblies produced thereby6 Oct 2026US 12,752,336 B2Solstice Advanced Materials US, Inc.
- Shutter disc for a semiconductor processing tool6 Oct 2026US 12,753,488 B2Taiwan Semiconductor Manufacturing Company.Ltd
- External cooling assembly for substrate support6 Oct 2026US 12,755,943 B2APPLIED Materials.Inc.
- Surface pre-oxidized AlCrVTiSiON nano-gradient coating and preparation method thereof22 Sep 2026US 12,742,236 B2
- Structures and methods for processing a semiconductor substrate22 Sep 2026US 12,742,237 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Deposition apparatus, thin-film deposition method using the same, and electronic apparatus manufactured using the same8 Oct 2026US 2026/0308749 A1Samsung Display Co., Ltd.
- Rotary electrical feedthrough integration for process chamber8 Oct 2026US 2026/0308750 A1APPLIED Materials.Inc.
- Sputtering apparatus and control method1 Oct 2026US 2026/0297725 A1Tokyo Electron Limited
- Film deposition apparatus1 Oct 2026US 2026/0297726 A1Tokyo Electron Limited
- Relative Positioning of Crystalline Material in Crystal Growth Systems1 Oct 2026US 2026/0297802 A1Wolfspeed, Inc.
Most cited
By later US patents
- Low pressure vapor phase deposition of organic thin films1,502US 6,337,102 B12002
- Wafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making same643US 4,978,567 AMaterials Technology Corporation, subsidiary of the Carbon/Graphite Group, Inc. · 1990
- Wafer heater assembly588US 5,796,074 AAPPLIED Materials.Inc. · 1998
- Heater block for heating wafer537US 6,207,932 B1Hyundai Electronics Industries Co., Ltd. · 2001
- Glass substrate-holding tool and method for producing an EUV mask blank by employing the same526US 8,967,608 B2Asahi Glass Company, Limited · 2015