C23C 14/3492
Variation of parameters during sputtering
Official title: {Variation of parameters during sputtering}
C23C14/3492 (Variation of parameters during sputtering) appears on 244 US grants and 343 published applications in this corpus.
Search patents in C23C- Granted patents
- 244
- Published applications
- 343
- Assignees
- 194
- Inventors
- 779
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 4 | 0 |
| 2001 | 2 | 1 |
| 2002 | 4 | 6 |
| 2003 | 4 | 6 |
| 2004 | 4 | 11 |
| 2005 | 4 | 13 |
| 2006 | 6 | 7 |
| 2007 | 4 | 6 |
| 2008 | 3 | 10 |
| 2009 | 3 | 5 |
| 2010 | 4 | 10 |
| 2011 | 5 | 20 |
| 2012 | 9 | 22 |
| 2013 | 9 | 21 |
| 2014 | 12 | 20 |
| 2015 | 16 | 28 |
| 2016 | 13 | 15 |
| 2017 | 15 | 11 |
| 2018 | 10 | 6 |
| 2019 | 15 | 18 |
| 2020 | 10 | 16 |
| 2021 | 13 | 13 |
| 2022 | 11 | 19 |
| 2023 | 15 | 19 |
| 2024 | 13 | 18 |
| 2025 | 18 | 12 |
| 2026 | 13 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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By later US patents
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