B81C 99/002
Apparatus for assembling mems
Official title: {Apparatus for assembling MEMS, e.g. micromanipulators (micromanipulators per se B25J7/00)}
B81C99/002 (Apparatus for assembling mems) appears on 148 US grants and 174 published applications in this corpus.
Search patents in B81C- Granted patents
- 148
- Published applications
- 174
- Assignees
- 96
- Inventors
- 267
- Latest grant
- 6 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 3 |
| 2003 | 3 | 10 |
| 2004 | 8 | 5 |
| 2005 | 4 | 5 |
| 2006 | 3 | 7 |
| 2007 | 3 | 6 |
| 2008 | 6 | 4 |
| 2009 | 2 | 5 |
| 2010 | 6 | 12 |
| 2011 | 5 | 4 |
| 2012 | 6 | 4 |
| 2013 | 7 | 5 |
| 2014 | 9 | 16 |
| 2015 | 15 | 15 |
| 2016 | 13 | 10 |
| 2017 | 7 | 8 |
| 2018 | 5 | 6 |
| 2019 | 5 | 8 |
| 2020 | 6 | 9 |
| 2021 | 8 | 3 |
| 2022 | 6 | 11 |
| 2023 | 8 | 2 |
| 2024 | 6 | 5 |
| 2025 | 3 | 9 |
| 2026 | 1 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method and arrangement for assembly of microchips into a separate substrate6 Jan 2026US 12,515,947 B2Sensible Holding B.V.
- Lensless near-contact imaging system for micro assembly18 Nov 2025US 12,477,237 B2Xerox Corporation
- System and method for model-predictive-control-based micro-assembly control with the aid of a digital computer20 May 2025US 12,307,629 B2Xerox Corporation
- Heterogeneous integration of components onto compact devices using moiré based metrology and vacuum based pick-and-place20 May 2025US 12,308,275 B2Board of Regents, The University of Texas System
- Micro assembler with fine angle control30 Jul 2024US 12,051,610 B2Xerox Corporation
- Lensless near-contact imaging system for micro assembly12 Mar 2026US 2026/0075327 A1Genesee Valley Innovations, LLC
- Heterogeneous integration of components onto compact devices using moiré based metrology and vacuum based pick-and-place1 Jan 2026US 2026/0005060 A1Board of Regents, The University of Texas System
- Heterogeneous integration of components onto compact devices using moiré based metrology and vacuum based pick-and-place18 Dec 2025US 2025/0385120 A1Board of Regents, The University of Texas System
- Heterogeneous integration of components onto compact devices using moiré based metrology and vacuum based pick-and-place18 Dec 2025US 2025/0385121 A1Board of Regents, The University of Texas System
- Method and system for depositing a nano-object on a receiving surface and fastening system incorporating such a deposition system13 Nov 2025US 2025/0349569 A1C12 quantum Electronics
Most cited
By later US patents
- Stabilization structure including shear release posts171US 9,217,541 B2LuxVue Technology Corporation · 2015
- Method and tool for handling micro-mechanical structures146US 6,255,721 B1Read-Rite Corporation · 2001
- Stabilization structure including sacrificial release layer and staging cavity144US 9,166,114 B2LuxVue Technology Corporation · 2015
- Microfabricated therapeutic actuator mechanisms112US 5,645,564 AThe Regents of the University of California · 1997
- Compliant monopolar micro device transfer head with silicon electrode70US 8,415,768 B1LuxVue Technology Corporation · 2013