B81C 2201/0178
Oxidation
B81C2201/0178 (Oxidation) appears on 63 US grants and 78 published applications in this corpus.
Search patents in B81C- Granted patents
- 63
- Published applications
- 78
- Assignees
- 50
- Inventors
- 188
- Latest grant
- 1 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1998 | 2 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 1 |
| 2002 | 1 | 5 |
| 2003 | 3 | 4 |
| 2004 | 3 | 3 |
| 2005 | 3 | 0 |
| 2006 | 1 | 2 |
| 2007 | 0 | 1 |
| 2008 | 2 | 0 |
| 2009 | 0 | 1 |
| 2010 | 1 | 0 |
| 2011 | 2 | 2 |
| 2012 | 0 | 1 |
| 2013 | 1 | 3 |
| 2014 | 3 | 0 |
| 2015 | 1 | 0 |
| 2016 | 1 | 2 |
| 2017 | 2 | 3 |
| 2018 | 3 | 2 |
| 2019 | 2 | 5 |
| 2020 | 1 | 7 |
| 2021 | 3 | 6 |
| 2022 | 5 | 6 |
| 2023 | 5 | 9 |
| 2024 | 8 | 9 |
| 2025 | 4 | 3 |
| 2026 | 5 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- MEMS sensor with a thin region1 Sep 2026US 12,726,773 B2Skyworks Solutions, Inc.
- Method for structural layer fabrication in micromechanical devices14 Jul 2026US 12,679,723 B2Murata Manufacturing Co., Ltd.
- Micro-electro-mechanical system (MEMS) device and fabrication method thereof19 May 2026US 12,630,416 B2Vanguard International Semiconductor Corporation
- MEMS sensor with two compliances10 Feb 2026US 12,549,906 B2Skyworks Solutions, Inc.
- Preventing electrode discontinuation on microdevice sidewall20 Jan 2026US 12,532,724 B2VueReal Inc.
- Preventing electrode discontinuation on microdevice sidewall14 May 2026US 2026/0136906 A1VueReal Inc.
- Methods of operating and manufacturing capacitive micromachined ultrasonic transducer with contoured electrode29 Jan 2026US 2026/0027584 A1The Board of Trustees of the Leland Stanford Junior University
- Capacitive sensor and method for manufacturing same8 Jan 2026US 2026/0008668 A1Murata Manufacturing Co., Ltd.
- Micro-electromechanical system device including a precision proof mass element and methods for forming the same13 Nov 2025US 2025/0346482 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Method and system for providing a reliable isolation stack in capacitive micromachined ultrasonic transducers27 Mar 2025US 2025/0100014 A1GE Precision Healthcare LLC
Most cited
By later US patents
- Method for forming micro cavity560US 6,342,427 B12002
- Staggered torsional electrostatic combdrive and method of forming same37US 6,758,983 B2The Regents of the University of California · 2004
- Transducer having a silicon diaphragm and method for forming same30US 5,736,430 ASSI Technologies, Inc. · 1998
- Insulating micro-structure and method of manufacturing same27US 6,797,589 B2Kionix, Inc. · 2004
- Single mask technique for making positive and negative micromachined features on a substrate23US 6,627,096 B2Shipley Company, L.L.C. · 2003