MEMS sensor with a thin region
AssigneeSkyworks Solutions, Inc.
InventorSiarhei Dmitrievich Barsukou
Life of this patent
Estimating the term…
Abstract
A piezoelectric microelectromechanical systems microphone is provided comprising a sensor, an anchor region at which the sensor is supported by a substrate, a first region of the sensor adjacent to the anchor region, the first region having at least one piezoelectric layer and at least one electrode, and a second region of the sensor, the second region being adjacent to the first region, having at least one piezoelectric layer and at least one electrode, and having a thickness less than the thickness of the first region. A method for manufacturing a piezoelectric microelectromechanical systems microphone is also provided.
Claims20
A piezoelectric microelectromechanical systems microphone comprising:
- a sensor;
- an anchor region at which the sensor is supported by a substrate;
- a first region of the sensor adjacent to the anchor region, the first region having at least one piezoelectric layer and at least one electrode;
- a second region of the sensor, the second region being adjacent to the first region, having at least one piezoelectric layer and at least one electrode, and having a thickness less than the thickness of the first region, at least one of an upper surface of the sensor or a lower surface of the sensor having a vertical step at a point of connection between the first region of the sensor and the second region of the sensor;
- and
- a third region of the sensor, having at least one layer of material, wherein the third region is adjacent to the second region but not adjacent to the first region.
A wireless mobile device comprising:
- one or more antennas;
- a front end system that communicates with the one or more antennas;
- and
- one or more piezoelectric microelectromechanical systems microphones, each microphone including a sensor, an anchor region at which the sensor is supported by a substrate, a first region of the sensor adjacent to the anchor region, the first region having at least one piezoelectric layer and at least one electrode, and a second region of the sensor, the second region being adjacent to the first region, having at least one piezoelectric layer and at least one electrode, and having a thickness less than the thickness of the first region, upper and lower surfaces of the sensor each having a vertical step at a point of connection between the first region of the sensor and the second region of the sensor.
Dependencies are inferred from the claim text.