MEMS sensor with two compliances

A method for manufacturing a piezoelectric microelectromechanical systems microphone, the method comprising:

• oxidizing a substrate;
• depositing at least one piezoelectric layer on the oxidized substrate;
• depositing at least one electrode at each of first and second regions of the at least one piezoelectric layer, the at least one electrode and at least one piezoelectric layer being alternated, the at least one electrode and at least one piezoelectric layer defining a sensor, the sensor having different compliances in the first and second regions of the sensor, the compliance of the second region being greater than the compliance of the first region;
• forming a third region connected to the second region on a side of the second region facing away from the first region, the third region having a compliance less than the compliance of the second region;
• and
• etching the substrate to define a cavity over which the sensor is located.

A wireless mobile device comprising:

• one or more antennas;
• a front end system electrically connected to the one or more antennas;
• and
• one or more piezoelectric microelectromechanical systems microphones, each microphone including a sensor, an anchor region at which the sensor is supported by a substrate, a first region of the sensor adjacent to the anchor region and having a first compliance, the first region having at least one piezoelectric layer and at least one electrode, a second region of the sensor having a second compliance that is greater than the first compliance, the second region being adjacent to the first region and having at least one piezoelectric layer and at least one electrode, and a third region of the sensor adjacent to the second region but not adjacent to the first region and having a third compliance, the third compliance being less than the second compliance.