B81C 2201/0161
Controlling physical properties of the material
B81C2201/0161 (Controlling physical properties of the material) appears on 300 US grants and 328 published applications in this corpus.
Search patents in B81C- Granted patents
- 300
- Published applications
- 328
- Assignees
- 154
- Inventors
- 623
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 2 | 0 |
| 1999 | 4 | 0 |
| 2000 | 1 | 0 |
| 2001 | 8 | 2 |
| 2002 | 6 | 11 |
| 2003 | 8 | 15 |
| 2004 | 12 | 16 |
| 2005 | 11 | 9 |
| 2006 | 11 | 10 |
| 2007 | 4 | 19 |
| 2008 | 7 | 4 |
| 2009 | 11 | 8 |
| 2010 | 7 | 12 |
| 2011 | 5 | 19 |
| 2012 | 9 | 15 |
| 2013 | 6 | 11 |
| 2014 | 12 | 11 |
| 2015 | 13 | 13 |
| 2016 | 17 | 28 |
| 2017 | 25 | 25 |
| 2018 | 29 | 20 |
| 2019 | 15 | 12 |
| 2020 | 17 | 11 |
| 2021 | 9 | 17 |
| 2022 | 10 | 5 |
| 2023 | 11 | 13 |
| 2024 | 10 | 8 |
| 2025 | 8 | 8 |
| 2026 | 5 | 6 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Mechanically coupled piezoelectric mems microphone25 Aug 2026US 12,715,759 B2Skyworks Solutions, Inc.
- Pressure sensor and manufacturing method for the same7 Apr 2026US 12,596,043 B2InvenSense, Inc.
- Laterally-doped MEMS resonator with piezoelectric layer17 Feb 2026US 12,556,157 B1SiTime Corporation
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
- Mems device with compensation of the mechanical stress and related manufacturing process4 Jun 2026US 2026/0152384 A1STMicroelectronics International N. V.
- Forming a Bonded Interface Using Plasma-Activated Surfaces9 Apr 2026US 2026/0097953 A1Quantum Valley Ideas Laboratories
- MEMS Resonator9 Apr 2026US 2026/0100692 A1SiTime Corporation
- Method of manufacturing a layered structure for a mems apparatus and mems apparatus having such a layered structure26 Feb 2026US 2026/0054980 A1OQmented GmbH
Most cited
By later US patents
- Method of manufacturing an X-ray exposure mask and device for controlling the internal stress of thin films246US 5,188,706 AKabushiki Kaisha Toshiba · 1993
- Thin film-structure and a method for producing the same240US 6,759,261 B2Tokyo Institute of Technology · 2004
- Adjusting operating characteristics of micromachined torsional oscillators132US 5,969,465 AXROS, Inc. · 1999
- Method of fabrication of an infrared radiation detector and infrared detector device104US 6,194,722 B1Interuniversitair Micro-Elektronica Centrum (IMEC vzw) · 2001
- Process for the production of accelerometers using silicon on insulator technology78US 5,576,250 ACommissariat A L' Energie Atomique · 1996