B81C 2201/0171
Doping materials
B81C2201/0171 (Doping materials) appears on 44 US grants and 53 published applications in this corpus.
Search patents in B81C- Granted patents
- 44
- Published applications
- 53
- Assignees
- 23
- Inventors
- 82
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 0 |
| 2006 | 1 | 1 |
| 2007 | 0 | 10 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 1 | 3 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 2 |
| 2014 | 2 | 0 |
| 2015 | 1 | 2 |
| 2016 | 5 | 3 |
| 2017 | 4 | 4 |
| 2018 | 4 | 4 |
| 2019 | 4 | 3 |
| 2020 | 6 | 4 |
| 2021 | 0 | 4 |
| 2022 | 3 | 0 |
| 2023 | 4 | 2 |
| 2024 | 4 | 3 |
| 2025 | 2 | 4 |
| 2026 | 2 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Laterally-doped MEMS resonator with piezoelectric layer17 Feb 2026US 12,556,157 B1SiTime Corporation
- MEMS resonator9 Dec 2025US 12,492,120 B2SiTime Corporation
- Non-lid-bonded MEMS resonator with phosphorus dopant14 Oct 2025US 12,445,107 B2SiTime Corporation
- MEMS resonator with colocated temperature sensor17 Sep 2024US 12,095,447 B1
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
- MEMS Resonator9 Apr 2026US 2026/0100692 A1SiTime Corporation
- MEMS Resonator with Co-packaged Thermistor19 Feb 2026US 2026/0048981 A1Stathera IP Holdings Inc.
- Laterally-doped mems resonator with piezoelectric layer21 Aug 2025US 2025/0266801 A1
- Mems resonator24 Apr 2025US 2025/0128937 A1SiTime Corporation
Most cited
By later US patents
- Wafer encapsulated microelectromechanical structure and method of manufacturing same16US 8,871,551 B2SiTime Corporation · 2014
- MEMS resonator15US 10,676,349 B1SiTime Corporation · 2020
- MEMS device and method of manufacturing same15US 8,916,407 B1SiTime Corporation · 2014
- Micro-electro-mechanical device having two buried cavities and manufacturing process thereof12US 9,688,531 B2STMicroelectronics S,r.l. · 2017
- Electrostatic drive type MEMS device and manufacturing method thereof, optical MEMS device, light modulation device, GLV device, and laser display11US 7,116,462 B2Sony Corporation · 2006