MEMS device and method of manufacturing same

A method of manufacturing a micromachined resonator having a moveable member in or on a substrate comprising:

• forming the moveable member of the micromachined resonator from a material having a first concentration of dopants of a first impurity type, wherein the moveable member includes a plurality of exposed surfaces;
• depositing a dopant carrier layer on or over at least at least one of the plurality of exposed surfaces of the moveable member, wherein the dopant carrier layer includes one or more dopants of the first impurity type;
• transferring at least a portion of the one or more dopants from the dopant carrier layer to the moveable member via the at least one of the plurality of exposed surfaces of the moveable member, wherein, in response, the concentration of dopants of the first impurity type in the moveable member increases by at least one order of magnitude;
• removing substantially all of the dopant carrier layer;
• and
• providing a cover over the moveable member of the micromachined resonator.

A method of manufacturing a micromachined resonator having a moveable member in or on a substrate comprising:

• forming the moveable member of the micromachined resonator from a material having a first concentration of dopants of a first impurity type, wherein the moveable member includes a plurality of exposed surfaces;
• depositing a dopant carrier layer on the plurality of exposed surfaces of the moveable member, wherein the dopant carrier layer includes one or more dopants of the first impurity type;
• transferring at least a portion of the one or more dopants from the dopant carrier layer to the moveable member, wherein, in response, the concentration of dopants of the first impurity type in the moveable member is greater than 1019 cm−3;
• removing substantially all of the dopant carrier layer;
• and
• providing a cover over the moveable member of the micromachined resonator.