B81C 2201/0133
Wet etching
B81C2201/0133 (Wet etching) appears on 264 US grants and 336 published applications in this corpus.
Search patents in B81C- Granted patents
- 264
- Published applications
- 336
- Assignees
- 182
- Inventors
- 791
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 3 | 0 |
| 2001 | 4 | 1 |
| 2002 | 2 | 8 |
| 2003 | 5 | 6 |
| 2004 | 6 | 4 |
| 2005 | 9 | 5 |
| 2006 | 4 | 5 |
| 2007 | 5 | 11 |
| 2008 | 3 | 5 |
| 2009 | 8 | 4 |
| 2010 | 7 | 6 |
| 2011 | 4 | 6 |
| 2012 | 6 | 7 |
| 2013 | 5 | 3 |
| 2014 | 8 | 8 |
| 2015 | 5 | 8 |
| 2016 | 10 | 18 |
| 2017 | 10 | 19 |
| 2018 | 15 | 20 |
| 2019 | 12 | 19 |
| 2020 | 23 | 22 |
| 2021 | 17 | 28 |
| 2022 | 18 | 26 |
| 2023 | 17 | 33 |
| 2024 | 26 | 24 |
| 2025 | 16 | 19 |
| 2026 | 12 | 21 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Methods for fabrication of MEMS device11 Aug 2026US 12,703,624 B2Omnitron Sensors Inc.
- Method for structural layer fabrication in micromechanical devices14 Jul 2026US 12,679,723 B2Murata Manufacturing Co., Ltd.
- Microchips for use in electron microscopes and related methods23 Jun 2026US 12,665,163 B2Northwestern University
- Method for manufacturing a low-noise electroacoustic transducer5 May 2026US 12,621,612 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Die stacking with controlled angular alignment28 Apr 2026US 12,612,306 B2STMicroelectronics International N. V.
- Micro-electro-mechanical system package and fabrication method thereof1 Oct 2026US 2026/0296879 A1Vanguard International Semiconductor Corporation
- Microchips for use in electron microscopes and related methods1 Oct 2026US 2026/0302128 A1Northwestern University
- Method for producing a microstructural element and microstructural element10 Sep 2026US 2026/0265049 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Mems device and preparation therefor2 Jul 2026US 2026/0184559 A1Aac Acoustic Technologies (Shenzhen) Co., Ltd.
- Silicon-metal composite micro-electro-mechanical system-based material atmospheric corrosion sensor, preparation method therefor, and material atmospheric corrosion detection equipment25 Jun 2026US 2026/0176132 A1University of Science and Technology Beijing
Most cited
By later US patents
- Method for forming micro cavity560US 6,342,427 B12002
- Biological identification system with integrated sensor chip66US 7,399,585 B2The United States of America as represented by the Secretary of the Navy · 2008
- Method of etching a sacrificial silicon oxide layer62US 8,679,354 B2Memsstar Limited · 2014
- Method for forming suspended micromechanical structures54US 6,020,272 ASandia Corporation · 2000
- Ultraviolet method of embedding structures in photocerams33US 6,932,933 B2The Aerospace Corporation · 2005