Die stacking with controlled angular alignment
AssigneeSTMicroelectronics International N.V.
InventorsChayathorn Saklang, Stephen Ryan Hooper, Scott M Hayes, Dwight Lee Daniels, Jin Yang
Life of this patent
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Abstract
An alignment recess formed in a cover substrate such as a cover for a MEMS device allows a second substrate to be bonded to the cover substrate. The alignment recess is larger than the second substrate and has two corner regions diagonally opposite each other where a wall of the recess protrudes to form a notch. The notch is dimensioned such that when the second substrate is disposed within the recess with two opposing corners surrounded by respective notches of the recess, the angular position of the second substrate relative to the cover substrate can be controlled to within a desired amount of rotation.
Claims14
A method comprising:
- disposing a cover above a first micro-electromechanical system (MEMS) component on a first substrate and coupling the cover to the first substrate, wherein the MEMS component comprises a mass suspended above the first substrate;
- forming an alignment recess in a top surface of the cover, wherein a wall of the alignment recess protrudes in a first corner region to form a first notch and protrudes in a second corner region to form a second notch that is diagonally opposite the first notch;
- and
- disposing a second substrate within the alignment recess and oriented along a second axis, wherein a first corner of the second substrate is disposed within the first notch of the alignment recess and a second corner of the second substrate is disposed within the second notch of the alignment recess;
- wherein positions of the first and second notch of the alignment recess define a first axis parallel to the top surface of the cover;
- and
- wherein the second substrate and the first and second notches of the alignment recess are dimensioned such that an angular separation between the first axis and the second axis is less than two degrees.
A method comprising:
- forming an alignment recess in a top surface of a cover substrate, wherein a wall of the alignment recess protrudes in a first corner region to form a first notch and protrudes in a second corner region to form a second notch that is diagonally opposite the first notch;
- and
- configuring the alignment recess to receive another substrate dimensioned such that a first corner of the other substrate rests in the first notch and a second corner of the other substrate rests in the second notch;
- wherein positions of the first notch and the second notch define a first axis parallel to the top surface of the cover substrate;
- and
- wherein the first and second notches of the alignment recess are dimensioned such that an angular separation between the first axis and an axis defined by positions of the first and second corner of the other substrate are angularly aligned to within less than two degrees of rotation.
A micro-electromechanical system (MEMS) device comprising:
- a first MEMS component comprising a mass suspended above a first substrate and a cover coupled to the first substrate and disposed above the mass;
- an alignment recess formed in a top surface of cover, wherein a wall of the alignment recess protrudes in a first corner region to form a first notch and protrudes in a second corner region to form a second notch that is diagonally opposite the first notch, wherein positions of the first notch of the alignment recess and the second notch of the alignment recess define a first axis parallel to the top surface of the cover;
- and
- a second substrate within the alignment recess and oriented along a second axis defined by positions of a first and second corner of the second substrate, wherein the first corner of the second substrate is disposed within the first notch of the alignment recess and the second corner of the second substrate is disposed within the second notch of the alignment recess;
- wherein the second substrate and the first and second notches of the alignment recess are dimensioned such that an angular separation between the first axis and the second axis is less than one degree.
Dependencies are inferred from the claim text.