B81B 3/004
Angular deflection
Official title: {Angular deflection}
B81B3/004 (Angular deflection) appears on 267 US grants and 313 published applications in this corpus.
Search patents in B81B- Granted patents
- 267
- Published applications
- 313
- Assignees
- 149
- Inventors
- 550
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 1 |
| 2002 | 3 | 5 |
| 2003 | 6 | 4 |
| 2004 | 6 | 5 |
| 2005 | 4 | 4 |
| 2006 | 3 | 2 |
| 2007 | 2 | 4 |
| 2008 | 1 | 6 |
| 2009 | 1 | 1 |
| 2010 | 4 | 7 |
| 2011 | 2 | 4 |
| 2012 | 4 | 11 |
| 2013 | 7 | 6 |
| 2014 | 14 | 9 |
| 2015 | 7 | 27 |
| 2016 | 14 | 19 |
| 2017 | 24 | 29 |
| 2018 | 15 | 13 |
| 2019 | 20 | 19 |
| 2020 | 11 | 20 |
| 2021 | 14 | 36 |
| 2022 | 21 | 25 |
| 2023 | 22 | 20 |
| 2024 | 25 | 12 |
| 2025 | 20 | 16 |
| 2026 | 9 | 8 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Micromechanical oscillation system4 Aug 2026US 12,699,263 B2Robert Bosch GmbH
- Microelectromechanical loudspeaker with a large-area force field28 Jul 2026US 12,692,150 B2Robert Bosch GmbH
- Method of manufacturing a cantilever sensor19 May 2026US 12,635,414 B2Skyworks Solutions, Inc.
- Low voltage electrostatic mems actuators for large angle tip, tilt, and piston beamsteering31 Mar 2026US 12,589,986 B2The United States of America as represented by the Secretary of the Air Force
- Mems comprising a comb drive, and method for producing same6 Aug 2026US 2026/0225874 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Mems device and method for characterizing a mems device11 Jun 2026US 2026/0159372 A1Infineon Technologies AG
- Mems device4 Jun 2026US 2026/0152382 A1Murata Manufacturing Co., Ltd.
- Light deflector16 Apr 2026US 2026/0103376 A1Stanley Electric Co., Ltd.
- Multidimensional cantilevers and stress-programmable out-of-plane interposers for 3-d photonic integration and control26 Mar 2026US 2026/0084954 A1The MITRE Corporation
Most cited
By later US patents
- Micromirror133US 6,749,308 B1Robert Bosch GmbH · 2004
- Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same52US 6,563,106 B1Calient Networks, Inc. · 2003
- Self-assemblying micro-mechanical device43US 5,994,159 ALucent Technologies Inc. · 1999
- Thin film actuated mirror array40US 5,481,396 AAura Systems, Inc. · 1996
- Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods38US 6,327,855 B1JDS Uniphase Corporation · 2001