Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
AssigneeJDS Uniphase Corporation
InventorsEdward A. Hill, Vijayakumar Rudrappa Dhuler
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Abstract
A micromechanical system can include a substrate, an actuator, and an actuated element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments. Related methods and actuators are also discussed.
Claims54
A micromechanical system comprising:
- a substrate;
- an actuator including a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments wherein first and second actuating segments are on opposite sides of an opposing segment with a first end of the opposing segment being connected to an end of the first actuating segment, with a second end of the opposing segment being connected to an end of the second actuating segment, and with the opposing segment being free of support other than the connections at the first and second ends thereof;
- and
- an actuated element attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments.
A micromechanical system comprising:
- a substrate;
- an actuator including a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments;
- an actuated element attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments;
- and
- a second actuator including a second serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the second serpentine arrangement moves relative to the substrate upon deflection of the actuating segments wherein the second end of the second serpentine arrangement is attached to the actuated element.
An actuator comprising:
- a serpentine arrangement of alternating actuating and opposing segments wherein the actuating segments deflect in response to actuation thereof wherein first and second actuating segments are on opposite sides of an opposing segment with a first end of the opposing segment being connected to an end of the first actuating segment, with a second end of the opposing segment being connected to an end of the second actuating segment, and with the opposing segment being free of support other than the connections at the first and second ends thereof.
A method of forming a micromechanical system on a substrate, the method comprising the steps of:
- forming an actuator including a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments;
- and
- forming an actuated element attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments.
A method of forming an actuator on a substrate, the method comprising the step of:
- forming a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments wherein first and second actuating segments are on opposite sides of an opposing segment with a first end of the opposing segment being connected to an end of the first actuating segment, with a second end of the opposing segment being connected to an end of the second actuating segment, and with the opposing segment being free of support other than the connections at the first and second ends thereof.
A method of forming an actuator on a substrate, the method comprising the step of:
- forming a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments wherein the alternating actuating and opposing segments comprise parallel beams;
- and
- forming an actuated element attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments.
A method of forming an actuator on a substrate, the method comprising the steps of:
- forming a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments;
- and
- forming a trench therein adjacent the serpentine arrangement.
Dependencies are inferred from the claim text.