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US 6,749,308 B1Granted
Micromirror
AssigneeRobert Bosch GmbH
InventorsAndreas Niendorf, Karsten Funk
Life of this patent
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Abstract
A micromirror (5), a micro-oscillating mirror in particular, having an at least largely cantilevered mirror surface (10) which may be displaced from the rest position about at least one torsional axis (17) is described. The mirror surface (10) is linked to at least one support body (11, 12) by at least two torsion beams (13, 13′), which are arranged at least approximately parallel to each other. Also described is the displacement of the micrometer from its rest position by an electrostatic or magnetic interaction.
Claims20
A micromirror, comprising:
- at least one support body;
- at least two torsion beams arranged at least approximately in parallel to each other;
- and
- an at least largely cantilevered mirror surface displaceable from a rest position about at least one torsional axis, the mirror surface connected to the support body by the torsion beams;
- wherein the two torsion beams extend parallel to the torsional axis from one lateral edge of the mirror to the support body.
2 more elements
Dependencies are inferred from the claim text.