Micromechanical oscillation system
AssigneeRobert Bosch GmbH
InventorsEugene Moliere Tanguep Njiokep, Frank Schatz, Helmut Grutzeck, Stefan Pinter, Johannes Baader, Rainer Straub, Timo Schary
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AssigneeRobert Bosch GmbH
InventorsEugene Moliere Tanguep Njiokep, Frank Schatz, Helmut Grutzeck, Stefan Pinter, Johannes Baader, Rainer Straub, Timo Schary
Estimating the term…
A micromechanical oscillation system that is designed as a micromirror system. The micromechanical oscillation system includes a micromechanical oscillating body that includes at least one micromirror. The micromechanical oscillating body is designed to oscillate about an oscillation axis, in particular at a resonant frequency of the oscillating body. The micromechanical oscillating body has a total mass made up of mass elements. The mass elements are distributed as a function of a lateral horizontal spacing of the mass elements from the oscillation axis.
A micromechanical oscillation system, comprising:
Dependencies are inferred from the claim text.