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US 2026/0152382 A1Published application
Mems device
AssigneeMurata Manufacturing Co., Ltd.
InventorMikko PARTANEN
Life of this patent
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Abstract
A MEMS device is provided with in-plane moving structures and translation beams to move a rotating structure out-of-plane. The arrangement of the translation beams contributes to the out-of-plane rotation of the rotating structure. Out-of-plane movement to the large tilt angles is achieved with lower voltage in comparison to two-layer tilting structures.
Claims17
A microelectromechanical device comprising:
- a device layer that defines an xy-plane comprising an x-direction and a vertical direction that is perpendicular to the xy-plane;
- a rotating structure in the device layer and including a first rotation axis that extends through the rotating structure and lies in the device layer;
- a drive structure in the device layer and configured to oscillate in linear motion along the x-direction of the xy-plane;
- and
- a driving system including a first driving unit that comprises:
- an anti-phase coupler,
- at least one first in-plane beam that extends in the x-direction from the drive structure to the anti-phase coupler,
- a first translation beam that extends in the x-direction from the drive structure to a first connection point on the rotating structure,
- and a second translation beam that extends in the x-direction from the anti-phase coupler to a second connection point on the rotating structure,
- wherein z-coordinates of the first connection point and the second connection point in the vertical direction are different from z-coordinate of the first rotation axis in the vertical direction.
7 more elements
Dependencies are inferred from the claim text.