B81B 3/0045
Improve properties related to angular swinging
Official title: {Improve properties related to angular swinging, e.g. control resonance frequency}
B81B3/0045 (Improve properties related to angular swinging) appears on 131 US grants and 159 published applications in this corpus.
Search patents in B81B- Granted patents
- 131
- Published applications
- 159
- Assignees
- 81
- Inventors
- 287
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2005 | 1 | 4 |
| 2006 | 1 | 1 |
| 2007 | 2 | 1 |
| 2008 | 1 | 1 |
| 2009 | 0 | 0 |
| 2010 | 1 | 0 |
| 2011 | 0 | 1 |
| 2012 | 1 | 4 |
| 2013 | 0 | 2 |
| 2014 | 4 | 5 |
| 2015 | 4 | 13 |
| 2016 | 6 | 12 |
| 2017 | 16 | 17 |
| 2018 | 9 | 11 |
| 2019 | 14 | 12 |
| 2020 | 7 | 8 |
| 2021 | 7 | 23 |
| 2022 | 14 | 12 |
| 2023 | 14 | 13 |
| 2024 | 15 | 8 |
| 2025 | 9 | 6 |
| 2026 | 5 | 5 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Micromechanical oscillation system4 Aug 2026US 12,699,263 B2Robert Bosch GmbH
- Method of manufacturing a cantilever sensor19 May 2026US 12,635,414 B2Skyworks Solutions, Inc.
- Cantilever sensor with modified resonance frequency10 Mar 2026US 12,575,325 B2Skyworks Solutions, Inc.
- MEMS mirror device and distance measuring apparatus3 Feb 2026US 12,541,091 B2Mitsubishi Electric Corporation
- MEMS-mirror device, LIDAR device and vehicle comprising a LIDAR device6 Jan 2026US 12,517,344 B2Vlc Holding B.V.
- Mems device and method for characterizing a mems device11 Jun 2026US 2026/0159372 A1Infineon Technologies AG
- Mems device4 Jun 2026US 2026/0152382 A1Murata Manufacturing Co., Ltd.
- Method of manufacturing a layered structure for a mems apparatus and mems apparatus having such a layered structure26 Feb 2026US 2026/0054980 A1OQmented GmbH
- Method of manufacturing a layered structure for a mems apparatus and mems apparatus with such a layered structure15 Jan 2026US 2026/0016683 A1OQmented GmbH
- Position sensing of mems moving structures1 Jan 2026US 2026/0002796 A1Preciseley Microtechnology Corp.
Most cited
By later US patents
- Accelerometer with reduced extraneous vibrations owing to improved electrode shape24US 7,797,998 B2Sercel · 2010
- Actuator device and mirror drive device24US 9,729,038 B2Hamamatsu Photonics K.K. · 2017
- MEMs devices18US 8,339,764 B2NXP B. V. · 2012
- Lever system for driving mirrors of a lidar transmitter10US 10,509,198 B1DiDi Research America, LLC · 2019
- Micromechanical actuator with multiple-plane comb electrodes and methods of making9US 7,329,930 B2Opus Microsystems Corporation · 2008