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US 12,541,091 B2Granted
MEMS mirror device and distance measuring apparatus
AssigneeMitsubishi Electric Corporation
InventorsYoshiaki Hirata, Nobuaki Konno, Yoshitaka Kajiyama
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Abstract
The MEMS mirror device includes a fixed member, a movable member rotatably coupled to the fixed member, a mirror, and a wire. The movable member includes a movable plate, a twist beam, and a meander beam. The meander beam is arranged along the twist beam. The mirror is formed on the movable plate. The wire extends from the movable plate to the fixed member. The wire is formed on the meander beam.
Claims18
A MEMS mirror device comprising:
- a fixed member;
- a movable member rotatably coupled to the fixed member;
- a mirror;
- and
- at least one first wire,
- the movable member including:
- a movable plate having a front surface;
- at least one first twist beam connected to the movable plate and having a longitudinal direction in a first direction;
- and
- at least one first meander beam connected to the movable plate and disposed along the at least one first twist beam,
- the mirror being formed on the front surface of the movable plate,
- the at least one first wire extending from the movable plate to the fixed member, and
- the at least one first wire being formed on the at least one first meander beam.
10 more elements
Dependencies are inferred from the claim text.