Method of manufacturing a cantilever sensor

A method of making a cantilever sensor, comprising:

• forming or providing a beam extending between a proximal portion and a distal end;
• forming or providing an electrode;
• attaching the electrode to the proximal portion of the beam, a distal portion of the beam between the electrode and distal end defining a tip of the sensor;
• and
• attaching the beam to a substrate in cantilever form so that the proximal portion of the beam is anchored to the substrate and the distal end of the beam is unsupported, said forming or providing the beam including forming at least the tip of the beam so that it has a greater height in a Z direction transverse to a length of the beam than the proximal portion of the beam to thereby tune a resonant frequency of the sensor, the forming of the tip including forming a corrugated structure with alternating first portions of relatively smaller height and second portions of relatively greater height, the forming of the alternating first portions and second portions including spacing the first portions from each other by a first gap distance and spacing the second portions from each other by a second gap distance.