Thin film actuated mirror array
AssigneeAura Systems, Inc.
InventorsJeong B. Ji, Gregory Um
Life of this patent
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Abstract
A thin film actuated mirror for an actuated mirror array includes a pedestal and at least piezoelectric structure cantilevered from the pedestal. The piezoelectric structure includes a layer of piezoelectric material having two opposing surfaces. Each of two metal electrodes are mounted on a respective one of the opposing surfaces of the piezoelectric material layer. An electrical signal is applied across the piezoelectric material, between the electrodes, causing deformation of the piezoelectric material. The thin film actuated mirror further includes a mirror surface interconnected to the piezoelectric material layer such that the mirror surface deforms in response to the deformation of the piezoelectric material layer.
Claims17
A thin film actuated mirror comprising:
- a pedestal;
- at least one piezoelectric structure cantilevered from said pedestal, said piezoelectric structure further comprising a piezoelectric material layer having two opposing surfaces, and two metal electrodes, each of said electrodes being mounted on a respective one of said opposing surfaces of said piezoelectric material, wherein an electrical signal applied across said piezoelectric material between said electrodes causes deformation of said piezoelectric material layer;
- and
- a mirror surface, said mirror surface being interconnected to said piezoelectric structure such that said mirror surface deforms in response to the deformation of said piezoelectric material layer.
Dependencies are inferred from the claim text.