Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same

The fabrication method of 12, wherein forming a mirror pattern includes:

• forming a first metal layer;
• forming a support layer on the first metal layer;
• and
• forming a second metal layer on the support layer.

A micro-electro-mechanical-system (MEMS) mirror device fabrication method, comprising:

• forming a release layer on a first substrate;
• forming a mirror pattern having a center mirror component and a hinge pattern supported by the release layer;
• forming electrodes supported by a second substrate;
• forming a support structure;
• attaching the first substrate with the second substrate using the support structure;
• removing the first substrate and the release layer such that the support structure supports the hinge pattern and mirror pattern.

A micro-electro-mechanical-system (MEMS) mirror device fabrication method, comprising:

• forming a release layer on a first substrate;
• forming a mirror pattern having a center mirror component and a hinge pattern supported by the release layer;
• forming electrodes supported by a second substrate;
• forming a support structure using a third substrate;
• attaching the first substrate with the second substrate using the support structure;
• removing the first substrate and release layer.

A micro-electro-mechanical-system (MEMS) mirror device fabrication method, comprising:

• forming electrodes supported by a first substrate;
• removing selectively portions of a second substrate on a bottom side;
• removing selectively portions of the second substrate on a topside to form a mirror pattern, frame pattern, hinge pattern, and support structure;
• and
• attaching the first substrate with the second substrate.