Low voltage electrostatic mems actuators for large angle tip, tilt, and piston beamsteering

An actuator assembly, comprising:

• a plurality of actuator elements, comprising:
• a first metallic layer contacting the substrate;
• a second metallic layer having a first portion contacting the substrate separated from the first metallic layer and a second portion having an end proximal to the first portion and distal end cantilevered over the substrate and first metallic layer;
• a first insulating layer contacting the second metallic layer on a bottom contacting surface of the second cantilevered portion from the proximal end to the distal end;
• and
• a second insulating layer contacting the second metallic layer on a portion of a top contacting surface at the distal end,
• wherein the second portion of the second metallic layer is prestressed causing the distal end to deform away from the substrate, and
• wherein applying a voltage potential between the first and second metallic layers creates an electrostatic field drawing the distal end toward the substrate;
• wherein an end of an actuator element of the plurality of actuator elements near the first portion of the second portion of the second metallic layer is connect to the distal end of the second metallic layer of another actuator element of the plurality of actuator elements forming a chain.

A method of forming an actuator element, the method comprising:

• depositing a first metallic layer on a substrate;
• depositing a first portion of a second metallic layer on the substrate separated from the first metallic layer;
• depositing a sacrificial layer proximate the first portion of the second metallic layer and on the substrate and first metallic layer;
• depositing a first dielectric on the sacrificial layer;
• depositing a second portion of the second metallic layer on the first dielectric, the second portion of the second metallic layer having an end proximal to and contacting at least part of the first portion of the second metallic layer and a distal end, the second portion of the metallic layer spanning from the proximal end to the distal end;
• depositing a second dielectric on a portion of the second portion of the second metallic layer at the distal end;
• and
• removing the sacrificial layer.