Forming source or drain recesses by etching e.g. recessing by etching and

Official title: {Forming source or drain recesses by etching e.g. recessing by etching and then refilling}

H10D62/021 (Forming source or drain recesses by etching e.g. recessing by etching and) appears on 3,781 US grants and 4,284 published applications in this corpus.