H01J 37/32256
Tuning means
Official title: {Tuning means}
H01J37/32256 (Tuning means) appears on 67 US grants and 72 published applications in this corpus.
Search patents in H01J- Granted patents
- 67
- Published applications
- 72
- Assignees
- 52
- Inventors
- 203
- Latest grant
- 19 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 1 | 0 |
| 1986 | 2 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 3 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 0 |
| 2002 | 3 | 5 |
| 2003 | 0 | 0 |
| 2004 | 0 | 1 |
| 2005 | 1 | 3 |
| 2006 | 0 | 1 |
| 2007 | 1 | 1 |
| 2008 | 0 | 0 |
| 2009 | 0 | 2 |
| 2010 | 0 | 1 |
| 2011 | 0 | 4 |
| 2012 | 4 | 1 |
| 2013 | 0 | 10 |
| 2014 | 3 | 3 |
| 2015 | 3 | 2 |
| 2016 | 5 | 3 |
| 2017 | 5 | 6 |
| 2018 | 3 | 2 |
| 2019 | 2 | 3 |
| 2020 | 2 | 2 |
| 2021 | 2 | 5 |
| 2022 | 3 | 2 |
| 2023 | 3 | 3 |
| 2024 | 3 | 5 |
| 2025 | 3 | 4 |
| 2026 | 1 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Microwave system for microwave-assisted surface chemistry annealing of ALD processes utilizing microwave radiation energy19 May 2026US 12,630,922 B2MKS Inc.
- Plasma processing apparatus4 Nov 2025US 12,463,013 B2Tokyo Electron Limited
- Large area microwave plasma CVD apparatus7 Oct 2025US 12,437,971 B2Vestlandets Innovasjonsselskap AS
- Plasma processing apparatus7 Oct 2025US 12,437,972 B2Tokyo Electron Limited
- Fleetwide impedance tuning performance optimization10 Dec 2024US 12,165,843 B2APPLIED Materials.Inc.
- Microwave plasma cvd device27 Aug 2026US 2026/0253840 A1National Institute of Advanced Industrial Science and Technology
- In situ cleaning of deposition chamber with microwave plasma13 Aug 2026US 2026/0234792 A1APPLIED Materials.Inc.
- A microwave plasma reactor with a plurality of emitters and absorbers and a method for plasma processing a workpiece using such a microwave plasma reactor18 Jun 2026US 2026/0171365 A1
- Dynamic frequency tuning for microwave power amplifiers2 Oct 2025US 2025/0308852 A1APPLIED Materials.Inc.
- Microwave plasma-enhanced chemical vapor deposition device25 Sep 2025US 2025/0297366 A1
Most cited
By later US patents
- Ion generating apparatus and method for the use thereof115US 4,507,588 ABoard of Trustees operating Michigan State University · 1985
- Plasma generating apparatus using magnets and method70US 4,727,293 ABoard of Trustees operating Michigan State University · 1988
- Dual plasma microwave apparatus and method for treating a surface68US 4,691,662 AMichigan State University · 1987
- Apparatus for the coating of material on a substrate using a microwave or UHF plasma65US 5,311,103 ABoard of Trustees operating Michigan State University · 1994
- Method for treating a surface with a microwave or UHF plasma and improved apparatus63US 4,585,668 AMichigan State University · 1986