H01J 37/26
Electron or ion microscopes
Official title: Electron or ion microscopes; Electron or ion diffraction tubes
H01J37/26 (Electron or ion microscopes) appears on 4,992 US grants and 5,273 published applications in this corpus.
Search patents in H01J- Granted patents
- 4,992
- Published applications
- 5,273
- Assignees
- 779
- Inventors
- 6,409
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 8 | 0 |
| 1977 | 12 | 0 |
| 1978 | 13 | 0 |
| 1979 | 3 | 0 |
| 1980 | 13 | 0 |
| 1981 | 5 | 0 |
| 1982 | 2 | 0 |
| 1983 | 6 | 0 |
| 1984 | 17 | 0 |
| 1985 | 15 | 0 |
| 1986 | 16 | 0 |
| 1987 | 17 | 0 |
| 1988 | 23 | 0 |
| 1989 | 29 | 0 |
| 1990 | 27 | 0 |
| 1991 | 25 | 0 |
| 1992 | 23 | 0 |
| 1993 | 16 | 0 |
| 1994 | 23 | 0 |
| 1995 | 29 | 0 |
| 1996 | 24 | 0 |
| 1997 | 17 | 0 |
| 1998 | 24 | 0 |
| 1999 | 21 | 0 |
| 2000 | 23 | 0 |
| 2001 | 29 | 19 |
| 2002 | 41 | 72 |
| 2003 | 98 | 89 |
| 2004 | 84 | 117 |
| 2005 | 94 | 115 |
| 2006 | 121 | 153 |
| 2007 | 104 | 145 |
| 2008 | 133 | 180 |
| 2009 | 118 | 171 |
| 2010 | 144 | 154 |
| 2011 | 145 | 187 |
| 2012 | 171 | 190 |
| 2013 | 187 | 223 |
| 2014 | 263 | 208 |
| 2015 | 224 | 273 |
| 2016 | 215 | 225 |
| 2017 | 233 | 234 |
| 2018 | 221 | 215 |
| 2019 | 256 | 313 |
| 2020 | 323 | 313 |
| 2021 | 270 | 277 |
| 2022 | 258 | 305 |
| 2023 | 220 | 320 |
| 2024 | 175 | 286 |
| 2025 | 241 | 290 |
| 2026 | 193 | 199 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method for electron beam-induced processing of a defect of a microlithographic photomask6 Oct 2026US 12,754,470 B2Carl Zeiss SMT GmbH
- Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflector6 Oct 2026US 12,755,923 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Aberration correction systems and charged particle microscope systems including the same6 Oct 2026US 12,755,924 B2FEI Company
- System and method for fully integrated microcrystal electron diffraction (MicroED)6 Oct 2026US 12,755,925 B2The Regents of the University of California
- Sample image observation device and method6 Oct 2026US 12,755,926 B2Hitachi High-Tech Corporation
- Sample preparation system for electron microscopy8 Oct 2026US 2026/0309653 A1The Regents of the University of California
- Systems and Methods for Uncertainty-Aware-Single-Particle Cryo-EM Data Collection Using Online Feedback8 Oct 2026US 2026/0311330 A1The Regents of the University of Michigan
- Correcting for grid distortion8 Oct 2026US 2026/0311956 A1ASML Netherlands B. V.
- Charged particle beam devices and membrane assemblies useful therein8 Oct 2026US 2026/0311957 A1Airsem Technologies Ltd.
- Method for operating a particle beam apparatus, computer program product and particle beam apparatus for carrying out the method8 Oct 2026US 2026/0311958 A1Carl Zeiss Microscopy GmbH
Most cited
By later US patents
- Electron beam inspection system and method266US 5,578,821 AKLA Instruments Corporation · 1996
- Electron beam inspection system and method257US 5,502,306 AKLA Instruments Corporation · 1996
- Method of detecting defects in patterned substrates227US 6,252,412 B1Schlumberger Technologies, Inc. · 2001
- Scanning tunneling microscope200US 4,343,993 AInternational Business Machines Corporation · 1982
- Microstructure defect detection182US 6,232,787 B1Schlumberger Technologies, Inc. · 2001