H01J 37/28
With scanning beams
Official title: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)}
H01J37/28 (With scanning beams) appears on 3,555 US grants and 3,856 published applications in this corpus.
Search patents in H01J- Granted patents
- 3,555
- Published applications
- 3,856
- Assignees
- 508
- Inventors
- 4,636
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 4 | 0 |
| 1977 | 9 | 0 |
| 1978 | 10 | 0 |
| 1979 | 3 | 0 |
| 1980 | 10 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 4 | 0 |
| 1984 | 7 | 0 |
| 1985 | 5 | 0 |
| 1986 | 8 | 0 |
| 1987 | 6 | 0 |
| 1988 | 11 | 0 |
| 1989 | 7 | 0 |
| 1990 | 14 | 0 |
| 1991 | 7 | 0 |
| 1992 | 11 | 0 |
| 1993 | 8 | 0 |
| 1994 | 9 | 0 |
| 1995 | 16 | 0 |
| 1996 | 15 | 0 |
| 1997 | 11 | 0 |
| 1998 | 16 | 0 |
| 1999 | 14 | 0 |
| 2000 | 18 | 0 |
| 2001 | 22 | 16 |
| 2002 | 34 | 58 |
| 2003 | 78 | 64 |
| 2004 | 61 | 89 |
| 2005 | 70 | 82 |
| 2006 | 86 | 117 |
| 2007 | 83 | 105 |
| 2008 | 96 | 127 |
| 2009 | 89 | 120 |
| 2010 | 100 | 103 |
| 2011 | 103 | 134 |
| 2012 | 121 | 140 |
| 2013 | 125 | 147 |
| 2014 | 176 | 135 |
| 2015 | 158 | 195 |
| 2016 | 155 | 151 |
| 2017 | 170 | 166 |
| 2018 | 141 | 152 |
| 2019 | 188 | 232 |
| 2020 | 237 | 240 |
| 2021 | 206 | 196 |
| 2022 | 189 | 232 |
| 2023 | 161 | 262 |
| 2024 | 132 | 215 |
| 2025 | 197 | 222 |
| 2026 | 153 | 156 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for electron beam-induced processing of a defect of a microlithographic photomask6 Oct 2026US 12,754,470 B2Carl Zeiss SMT GmbH
- Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflector6 Oct 2026US 12,755,923 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Aberration correction systems and charged particle microscope systems including the same6 Oct 2026US 12,755,924 B2FEI Company
- Sample image observation device and method6 Oct 2026US 12,755,926 B2Hitachi High-Tech Corporation
- Operation methods of 2D pixelated detector for an apparatus with plural charged-particle beams and mapping surface potentials6 Oct 2026US 12,755,928 B2ASML Netherlands B. V.
- Sample preparation system for electron microscopy8 Oct 2026US 2026/0309653 A1The Regents of the University of California
- Correcting for grid distortion8 Oct 2026US 2026/0311956 A1ASML Netherlands B. V.
- Charged particle beam devices and membrane assemblies useful therein8 Oct 2026US 2026/0311957 A1Airsem Technologies Ltd.
- Method for operating a particle beam apparatus, computer program product and particle beam apparatus for carrying out the method8 Oct 2026US 2026/0311958 A1Carl Zeiss Microscopy GmbH
- Systems and methods for subvoxel sem based volume electron microscopy8 Oct 2026US 2026/0311959 A1Yale University
Most cited
By later US patents
- Electron beam inspection system and method266US 5,578,821 AKLA Instruments Corporation · 1996
- Electron beam inspection system and method257US 5,502,306 AKLA Instruments Corporation · 1996
- Method of detecting defects in patterned substrates227US 6,252,412 B1Schlumberger Technologies, Inc. · 2001
- Scanning tunneling microscope200US 4,343,993 AInternational Business Machines Corporation · 1982
- Microstructure defect detection182US 6,232,787 B1Schlumberger Technologies, Inc. · 2001