H01J 37/285
Emission microscopes
Official title: Emission microscopes, e.g. field-emission microscopes
H01J37/285 (Emission microscopes) appears on 216 US grants and 221 published applications in this corpus.
Search patents in H01J- Granted patents
- 216
- Published applications
- 221
- Assignees
- 123
- Inventors
- 520
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 1 | 0 |
| 1991 | 4 | 0 |
| 1992 | 3 | 0 |
| 1993 | 1 | 0 |
| 1994 | 4 | 0 |
| 1995 | 4 | 0 |
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 0 |
| 2002 | 0 | 1 |
| 2003 | 2 | 5 |
| 2004 | 1 | 2 |
| 2005 | 3 | 3 |
| 2006 | 5 | 3 |
| 2007 | 2 | 3 |
| 2008 | 2 | 5 |
| 2009 | 2 | 5 |
| 2010 | 4 | 8 |
| 2011 | 3 | 9 |
| 2012 | 7 | 7 |
| 2013 | 5 | 6 |
| 2014 | 8 | 8 |
| 2015 | 8 | 17 |
| 2016 | 14 | 29 |
| 2017 | 24 | 16 |
| 2018 | 10 | 11 |
| 2019 | 18 | 17 |
| 2020 | 17 | 12 |
| 2021 | 13 | 15 |
| 2022 | 9 | 12 |
| 2023 | 11 | 7 |
| 2024 | 4 | 5 |
| 2025 | 7 | 11 |
| 2026 | 5 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Charged particle beam apparatus and method for operating the same178US 7,045,781 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · 2006
- Charged particle beam apparatus and method for operating the same159US 7,274,018 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · 2007
- Apparatus and method for secondary electron emission microscope91US 5,973,323 AKLA-Tencor Corporation · 1999
- E-beam inspection apparatus and method of using the same on various integrated circuit chips76US 9,496,119 B1PDF Solutions, Inc. · 2016
- Electrostatic emission lens55US 4,255,661 AMax-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V. · 1981