Spin-polarized scanning electron microscope
AssigneeHitachi High-Tech Corporation
InventorsTeruo Kohashi, Hideo Morishita, Takashi Ohshima, Makoto Kuwahara
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AssigneeHitachi High-Tech Corporation
InventorsTeruo Kohashi, Hideo Morishita, Takashi Ohshima, Makoto Kuwahara
Estimating the term…
Provided is a spin-polarized scanning electron microscope capable of improving an SNR of a detected signal. The spin-polarized scanning electron microscope includes: a spin-polarized electron source configured to irradiate a sample with a spin-polarized electron beam that is an electron beam whose spin is deflected in a specific direction; a scanning unit configured to scan the sample by deflecting the spin-polarized electron beam; a spin detector configured to detect a spin direction of an emitted electron that is an electron emitted from the sample scanned with the spin-polarized electron beam; and a control unit configured to control the spin direction to be detected by the spin detector based on the spin direction of the spin-polarized electron beam.
A spin-polarized scanning electron microscope comprising:
A spin-polarized scanning electron microscope comprising:
Dependencies are inferred from the claim text.