H01J 37/023
Means for mechanically adjusting components not otherwise provided for
Official title: {Means for mechanically adjusting components not otherwise provided for}
H01J37/023 (Means for mechanically adjusting components not otherwise provided for) appears on 130 US grants and 158 published applications in this corpus.
Search patents in H01J- Granted patents
- 130
- Published applications
- 158
- Assignees
- 81
- Inventors
- 391
- Latest grant
- 28 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 0 |
| 2003 | 2 | 3 |
| 2004 | 2 | 0 |
| 2005 | 0 | 3 |
| 2006 | 2 | 4 |
| 2007 | 1 | 2 |
| 2008 | 4 | 0 |
| 2009 | 0 | 5 |
| 2010 | 5 | 6 |
| 2011 | 4 | 5 |
| 2012 | 5 | 6 |
| 2013 | 3 | 10 |
| 2014 | 10 | 5 |
| 2015 | 5 | 10 |
| 2016 | 10 | 12 |
| 2017 | 7 | 9 |
| 2018 | 8 | 10 |
| 2019 | 11 | 14 |
| 2020 | 10 | 8 |
| 2021 | 12 | 10 |
| 2022 | 6 | 6 |
| 2023 | 6 | 7 |
| 2024 | 6 | 10 |
| 2025 | 3 | 11 |
| 2026 | 3 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Managing beam power effects by varying base emissivity28 Jul 2026US 12,695,048 B2APPLIED Materials.Inc.
- Actuator arrangement and electron-optical column21 Apr 2026US 12,609,265 B2ASML Netherlands B. V.
- Charged particle optics components and their fabrication13 Jan 2026US 12,525,422 B2FEI Company
- Method and apparatus for inspection16 Dec 2025US 12,500,063 B2ASML Netherlands B. V.
- Aberration correction in charged particle system12 Aug 2025US 12,387,903 B2ASML Netherlands B. V.
- Multipole magnet adjustment system and multipole magnet adjustment method13 Aug 2026US 2026/0237591 A1Kabushiki Kaisha Toshiba
- Teaching of charged-particle microscopy robotic grippers via beamsplitting26 Feb 2026US 2026/0058090 A1FEI Company
- Light collection/injection mirror alignment25 Dec 2025US 2025/0391631 A1
- Modular assembly23 Oct 2025US 2025/0329509 A1ASML Netherlands B. V.
- Grid-less ion angle detector18 Sep 2025US 2025/0291076 A1Tokyo Electron Limited
Most cited
By later US patents
- Multi-charged beam lens and charged beam exposure apparatus using the same40US 7,060,984 B2Canon Kabushiki Kaisha · 2006
- High-voltage insulation device for charged-particle optical apparatus23US 9,093,201 B2IMS Nanofabrication GmbH · 2015
- Charged beam drawing apparatus19US 6,495,841 B1Kabushiki Kaisha Toshiba · 2002
- Scanning interference electron microscope15US 7,417,227 B2Hitachi High-Technologies Corporation · 2008
- Magnifying observation apparatus13US 8,674,301 B2Keyence Corporation · 2014