Actuator arrangement and electron-optical column
AssigneeASML Netherlands B.V.
InventorsDerk Ferdinand Walvoort, Marc Smits, Teunis Van De Peut
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Abstract
Disclosed herein is an actuator arrangement comprising: a wall defining a cavity; a casing protruding from the wall and defining an interior in fluid communication with the cavity; an actuator comprising: a force imparter configured to impart force on a component in the cavity; and an actuation mechanism configured to drive the force imparter, wherein at least part of the actuation mechanism is within said interior of the casing and exposed to the cavity; and a control element configured to control the actuation mechanism, wherein the control element extends through the casing via a seal.
Claims20
An actuator arrangement comprising:
- a wall defining a cavity;
- a casing protruding from the wall and defining an interior in fluid communication with the cavity;
- an actuator comprising:
- a force imparter configured to impart force on a component in the cavity;
- and
- an actuation mechanism configured to drive the force imparter, wherein at least part of the actuation mechanism is within said interior of the casing being in fluid communication with the cavity;
- and
- a control element configured to control the actuation mechanism, wherein the control element extends through the casing via a feedthrough.
A method of manufacturing an actuator arrangement, the method comprising:
- providing a wall defining a cavity;
- providing an actuator comprising:
- a force imparter configured to impart force on a component in the cavity;
- and
- an actuation mechanism configured to drive the force imparter;
- extending a control element configured to control the actuation mechanism through a casing via a feedthrough;
- disposing the actuation mechanism within an interior of the casing;
- connecting the actuation mechanism to the control element;
- and
- sealing the casing to the wall such that the casing protrudes from the wall and the interior of the casing is in fluid communication with the cavity.
A method of replacing an actuation mechanism of an actuator arrangement comprising a wall defining a cavity, a casing protruding from the wall and defining an interior that is in fluid communication with the cavity, the casing being sealed to the wall by a seal, a force imparter configured to impart force on a component in the cavity, the actuation mechanism configured to drive the force imparter, part of the actuation mechanism being disposed in the interior of the casing, and a control element extending through the casing via a feedthrough and configured to control the actuation mechanism, and the method comprising:
- releasing the seal between the wall and the casing;
- replacing the actuation mechanism;
- and
- sealing the casing to the wall.
An actuator arrangement comprising:
- a wall of a vacuum chamber configured to be maintained at a vacuum, the wall configured to define a cavity;
- a casing configured protrude outwards from the wall and configured to define an interior in fluid communication with the cavity;
- an actuator comprising:
- a force imparter configured to impart force on a component in the cavity;
- and
- an actuation mechanism configured to drive the force imparter, wherein at least part of the actuation mechanism is within said interior of the casing being in fluid communication with the cavity;
- and
- a control element configured to control the actuation mechanism, wherein the control element extends through the casing via a feedthrough.
Dependencies are inferred from the claim text.